发明授权
- 专利标题: Backside illuminated imaging sensor with vertical pixel sensor
- 专利标题(中): 背面照明成像传感器与垂直像素传感器
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申请号: US12260019申请日: 2008-10-28
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公开(公告)号: US08063465B2公开(公告)日: 2011-11-22
- 发明人: Yin Qian , Hsin-Chih Tai , Duli Mao , Vincent Venezia , Howard E. Rhodes
- 申请人: Yin Qian , Hsin-Chih Tai , Duli Mao , Vincent Venezia , Howard E. Rhodes
- 申请人地址: US CA Santa Clara
- 专利权人: OmniVision Technologies, Inc.
- 当前专利权人: OmniVision Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely Sokoloff Taylor & Zafman LLP
- 主分类号: H01L31/00
- IPC分类号: H01L31/00 ; H01L31/0232
摘要:
A backside illuminated imaging sensor includes a vertical stacked sensor that reduces cross talk by using different silicon layers to form photodiodes at separate levels within a stack (or separate stacks) to detect different colors. Blue light-, green light-, and red light-detection silicon layers are formed, with the blue light detection layer positioned closest to the backside of the sensor and the red light detection layer positioned farthest from the backside of the sensor. An anti-reflective coating (ARC) layer can be inserted in between the red and green light detection layers to reduce the optical cross talk captured by the red light detection layer. Amorphous polysilicon can be used to form the red light detection layer to boost the efficiency of detecting red light.
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