Invention Grant
US08092660B2 Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
有权
用于沉积亲水涂层的方法和设备,以及用于薄膜的沉积技术
- Patent Title: Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
- Patent Title (中): 用于沉积亲水涂层的方法和设备,以及用于薄膜的沉积技术
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Application No.: US11129820Application Date: 2005-05-16
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Publication No.: US08092660B2Publication Date: 2012-01-10
- Inventor: Kari Myli , Gary Pfaff , James Brownlee , John German , Annette Krisko , Klaus Hartig
- Applicant: Kari Myli , Gary Pfaff , James Brownlee , John German , Annette Krisko , Klaus Hartig
- Applicant Address: US MN Eden Prairie
- Assignee: Cardinal CG Company
- Current Assignee: Cardinal CG Company
- Current Assignee Address: US MN Eden Prairie
- Agency: Fredrikson & Byron, P.A.
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
Public/Granted literature
- US20060118408A1 Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films Public/Granted day:2006-06-08
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