Invention Grant
US08092660B2 Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films 有权
用于沉积亲水涂层的方法和设备,以及用于薄膜的沉积技术

Methods and equipment for depositing hydrophilic coatings, and deposition technologies for thin films
Abstract:
The invention provides certain embodiments that involve sputtering techniques for applying a mixed oxide film comprising silica and titania. In these embodiments, the techniques involve sputtering at least two targets in a common chamber (e.g., in a shared gaseous atmosphere). A first of these targets includes silicon, while a second of the targets includes titanium. Further, the invention provides embodiments involving a substrate bearing a hydrophilic coating, which can be deposited by sputtering or any other suitable thin film deposition technique. The invention also provides techniques and apparatuses useful for depositing a wide variety of coating types. For example, the invention provides thin film deposition technologies in which sputtering apparatuses or other thin film deposition apparatuses are employed.
Information query
Patent Agency Ranking
0/0