Invention Grant
US08120781B2 Interferometric systems and methods featuring spectral analysis of unevenly sampled data
有权
干涉测量系统和方法对不均匀采样数据进行光谱分析
- Patent Title: Interferometric systems and methods featuring spectral analysis of unevenly sampled data
- Patent Title (中): 干涉测量系统和方法对不均匀采样数据进行光谱分析
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Application No.: US12509083Application Date: 2009-07-24
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Publication No.: US08120781B2Publication Date: 2012-02-21
- Inventor: Jan Liesener , Mark Davidson , Peter J De Groot , Xavier Colonna De Lega , Leslie L. Deck
- Applicant: Jan Liesener , Mark Davidson , Peter J De Groot , Xavier Colonna De Lega , Leslie L. Deck
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.
Public/Granted literature
- US20100128283A1 INTERFEROMETRIC SYSTEMS AND METHODS FEATURING SPECTRAL ANALYSIS OF UNEVENLY SAMPLED DATA Public/Granted day:2010-05-27
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