发明授权
US08120781B2 Interferometric systems and methods featuring spectral analysis of unevenly sampled data
有权
干涉测量系统和方法对不均匀采样数据进行光谱分析
- 专利标题: Interferometric systems and methods featuring spectral analysis of unevenly sampled data
- 专利标题(中): 干涉测量系统和方法对不均匀采样数据进行光谱分析
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申请号: US12509083申请日: 2009-07-24
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公开(公告)号: US08120781B2公开(公告)日: 2012-02-21
- 发明人: Jan Liesener , Mark Davidson , Peter J De Groot , Xavier Colonna De Lega , Leslie L. Deck
- 申请人: Jan Liesener , Mark Davidson , Peter J De Groot , Xavier Colonna De Lega , Leslie L. Deck
- 申请人地址: US CT Middlefield
- 专利权人: Zygo Corporation
- 当前专利权人: Zygo Corporation
- 当前专利权人地址: US CT Middlefield
- 代理机构: Fish & Richardson P.C.
- 主分类号: G01B11/02
- IPC分类号: G01B11/02
摘要:
In certain aspects, interferometry methods are disclosed that include providing one or more interferometry signals for a test object, wherein the interferometry signals correspond to a sequence of optical path difference (OPD) values which are not all equally spaced from one another because of noise, providing information about the unequal spacing of the sequence of OPD values, decomposing each of the interferometry signals into a contribution from a plurality of basis functions each corresponding to a different frequency and sampled at the unequally spaced OPD values, and using information about the contribution from each of the multiple basis functions to each of the interferometry signals to determine information about the test object.
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