Invention Grant
- Patent Title: Self displacement sensing cantilever and scanning probe microscope
- Patent Title (中): 自动位移检测悬臂和扫描探针显微镜
-
Application No.: US12592428Application Date: 2009-11-24
-
Publication No.: US08161568B2Publication Date: 2012-04-17
- Inventor: Masato Iyoki , Naoya Watanabe
- Applicant: Masato Iyoki , Naoya Watanabe
- Applicant Address: JP
- Assignee: SII NanoTechnology Inc.
- Current Assignee: SII NanoTechnology Inc.
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2008-302429 20081127
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B11/14 ; G01B11/02
Abstract:
A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.
Public/Granted literature
- US20100132075A1 Self displacement sensing cantilever and scanning probe microscope Public/Granted day:2010-05-27
Information query
