公开(公告)号：US08214915B2

公开(公告)日：2012-07-03

申请号：US12455556

申请日：2009-06-03

申请人： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

发明人： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

IPC分类号： G01Q20/00

CPC分类号： G01Q70/14 ,  G01G3/12 ,  G01G9/00 ,  G01Q10/045 ,  G01Q60/32

摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

摘要翻译： 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

公开(公告)号：US07945965B2

公开(公告)日：2011-05-17

申请号：US12416634

申请日：2009-04-01

申请人： Naoya Watanabe ,  Masatsugu Shigeno ,  Masato Iyoki

发明人： Naoya Watanabe ,  Masatsugu Shigeno ,  Masato Iyoki

IPC分类号： H01J37/252

CPC分类号： G01Q20/04 ,  G01Q30/14

摘要： The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.

摘要翻译： 传感器具有包括主体部分，细长带状柔性基板，连接部件，树脂部分和形成在柔性基板的端部的外部触点的自检探测器。 探头还包括一个悬臂，其基端支撑在主体部分，一个应变阻力元件，其电阻值根据悬臂的位移量而变化，并且与应变电阻元件电连接。 探针尖端形成在悬臂的前端。 柔性基板具有夹在两个绝缘片之间的互连图案。 柔性基板支撑主体部分，而悬臂向外突出。 将柔性基板的至少一端从液体中取出。 连接构件将互连件与互连图案连接。 互连件，连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。

公开(公告)号：US20100107284A1

公开(公告)日：2010-04-29

申请号：US12455556

申请日：2009-06-03

申请人： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

发明人： Masatsugu Shigeno ,  Kazutoshi Watanabe ,  Masato Iyoki ,  Naoya Watanabe

IPC分类号： G01Q20/00 ,  G01Q70/08 ,  G01G3/16

CPC分类号： G01Q70/14 ,  G01G3/12 ,  G01G9/00 ,  G01Q10/045 ,  G01Q60/32

摘要： Provided is a cantilever that is capable of bending and deforming in an active manner by itself. The cantilever includes: a lever portion having a proximal end that is supported by a main body part; and a resistor member that is formed in the cantilever and generates heat when a voltage is applied, to thereby deform the lever portion by thermal expansion due to the heat.

摘要翻译： 本发明提供一种能够以活跃的方式自身弯曲和变形的悬臂。 悬臂包括：杠杆部分，其具有由主体部分支撑的近端; 以及形成在悬臂中并在施加电压时产生热量的电阻器构件，从而通过由于热量的热膨胀而使杆部变形。

公开(公告)号：US08161568B2

公开(公告)日：2012-04-17

申请号：US12592428

申请日：2009-11-24

申请人： Masato Iyoki ,  Naoya Watanabe

发明人： Masato Iyoki ,  Naoya Watanabe

IPC分类号： G01B11/00 ,  G01B11/14 ,  G01B11/02

CPC分类号： G01Q20/04 ,  G01Q30/025 ,  G01Q70/14

摘要： A cantilever has a probe portion and a cantilever portion having a free end portion from which the probe portion extends. A displacement detecting portion detects a displacement of the cantilever portion according to an interaction between a sample and the probe portion. An electrode portion is connected to the displacement detecting portion. An insulation film is formed over at least one of the electrode portion and the displacement detecting portion. A functional coating in the form one of a conductive film, a magnetic film, and a film having a light intensity amplifying effect is disposed on the insulation film.

摘要翻译： 悬臂具有探针部分和具有探针部分延伸的自由端部的悬臂部分。 位移检测部根据样品与探针部之间的相互作用来检测悬臂部的位移。 电极部分连接到位移检测部分。 在电极部分和位移检测部分中的至少一个上形成绝缘膜。 导电膜，磁性膜和具有光强度放大效果的膜形式的功能性涂层设置在绝缘膜上。

公开(公告)号：US20100132075A1

公开(公告)日：2010-05-27

申请号：US12592428

申请日：2009-11-24

申请人： Masato Iyoki ,  Naoya Watanabe

发明人： Masato Iyoki ,  Naoya Watanabe

IPC分类号： G01Q20/02 ,  G01Q20/00

CPC分类号： G01Q20/04 ,  G01Q30/025 ,  G01Q70/14

摘要： Provided is a self displacement sensing cantilever, including: a cantilever (4) that has a probe (2) at its tip and has a distal end portion (3) at its distal end; a displacement detecting portion (5) that is provided to the cantilever (4), for detecting a displacement of the cantilever (4); an electrode portion (6) that is connected to the displacement detecting portion (5) and is communicated with the distal end portion (3); and an insulation film (7) that is formed over at least one of the electrode portion (6) and the displacement detecting portion (5) of the cantilever (4), in which the insulation film (7) is applied a coating of an arbitrary functional material (8). As a result, measurement with a scanning probe microscope may be performed at the same time as projecting light.

摘要翻译： 本发明提供一种自移位检测悬臂，包括：悬臂（4），其顶端具有探针（2），并在其远端具有远端部分（3）; 位移检测部（5），其设置在所述悬臂（4）上，用于检测所述悬臂（4）的位移; 与所述位移检测部（5）连接并与所述前端部（3）连通的电极部（6）。 以及形成在所述悬臂（4）的所述电极部（6）和所述位移检测部（5）中的至少一个上的绝缘膜（7），其中所述绝缘膜（7）被涂覆在所述悬臂 任意功能材料（8）。 结果，可以在与投射光同时进行扫描探针显微镜的测量。

公开(公告)号：US20090265819A1

公开(公告)日：2009-10-22

申请号：US12416634

申请日：2009-04-01

申请人： Naoya Watanabe ,  Masatsugu Shigeno ,  Masato Iyoki

发明人： Naoya Watanabe ,  Masatsugu Shigeno ,  Masato Iyoki

IPC分类号： G01N13/10

CPC分类号： G01Q20/04 ,  G01Q30/14

摘要： The sensor has the self-detecting probe including a body portion, an elongated belt-like flexible substrate, connecting members, a resinous portion, and external contacts formed at the ends of the flexible substrate brought out of liquid. The probe further includes a cantilever whose base end is supported to the body portion, a strain resistive element whose resistance value varies according to the amount of displacement of the cantilever, and interconnects electrically connected with the strain resistive element. A probe tip is formed at the front end of the cantilever. The flexible substrate has an interconnect pattern sandwiched between two insulating sheets. The flexible substrate supports the body portion while the cantilever protrudes outwardly. At least one end of the flexible substrate is brought out of liquid. The connecting members connect the interconnects with the interconnect pattern. The interconnects, connecting members, and the portions of the connecting members electrically connected with the interconnect pattern are coated with the resinous portion.

摘要翻译： 传感器具有包括主体部分，细长带状柔性基板，连接部件，树脂部分和形成在柔性基板的端部的外部触点的自检探测器。 探头还包括一个悬臂，其基端支撑在主体部分，一个应变阻力元件，其电阻值根据悬臂的位移量而变化，并且与应变电阻元件电连接。 探针尖端形成在悬臂的前端。 柔性基板具有夹在两个绝缘片之间的互连图案。 柔性基板支撑主体部分，而悬臂向外突出。 将柔性基板的至少一端从液体中取出。 连接构件将互连件与互连图案连接。 互连件，连接件以及与互连图形电连接的连接件的部分涂覆有树脂部分。

公开(公告)号：US07614287B2

公开(公告)日：2009-11-10

申请号：US11842722

申请日：2007-08-21

申请人： Masato Iyoki ,  Hiroyoshi Yamamoto

发明人： Masato Iyoki ,  Hiroyoshi Yamamoto

IPC分类号： G01B5/28

CPC分类号： G01Q20/00 ,  G01Q10/04 ,  G01Q30/18 ,  G01Q70/02

摘要： A displacement detection mechanism for a scanning probe microscope capable of performing measurement quickly with high precision even if an objective lens or an illumination system is arranged above or below a sample or a cantilever, and a scanning probe microscope comprising it. The displacement detection mechanism (112) for a scanning probe microscope comprising a supporting section (22) for supporting a cantilever (20), a light source (114) for irradiating a reflective surface (14) with light, and a light receiving section (121) for receiving light reflected off the reflective surface (14), and detecting displacement of the cantilever (20) based on the light receiving position of the light receiving section (121), wherein the rear end of the cantilever (20) is secured to the supporting section (22), and the above light is allowed to impinge on the reflective surface (14), while inclining toward the X axis and Y axis, from above regions B and C on the distal end side of the cantilever (20) out of regions A, B, C and D sectioned, when viewed from the above, by the Y axis extending in the longitudinal direction of the cantilever (20) and the X axis passing through the reflective surface (14) and extending in the direction intersecting the Y axis perpendicularly.

摘要翻译： 即使将物镜或照明系统配置在样本或悬臂的上方或下方，也可以以高精度快速进行测量的扫描探针显微镜以及包括该扫描探针显微镜的扫描探针显微镜。 一种用于扫描探针显微镜的位移检测机构（112），包括用于支撑悬臂（20）的支撑部分（22），用于用光照射反射表面（14）的光源（114）和光接收部分 121），用于接收从所述反射表面（14）反射的光，以及基于所述光接收部分（121）的光接收位置检测所述悬臂（20）的位移，其中所述悬臂（20）的后端被固定 到所述支撑部分（22），并且当所述悬臂（20）的远端侧上方的区域B和C向X轴和Y轴倾斜时，允许上述光照射在所述反射表面（14）上 ）在从上方观察的区域A，B，C和D中，通过沿悬臂（20）的纵向方向延伸的Y轴和穿过反射表面（14）的X轴延伸并在 方向垂直于Y轴 。

公开(公告)号：US20090189485A1

公开(公告)日：2009-07-30

申请号：US12276740

申请日：2008-11-24

申请人： Masato Iyoki

发明人： Masato Iyoki

IPC分类号： H01L41/00 ,  G01R27/08 ,  G01B7/16

CPC分类号： G01B7/18 ,  G01Q10/04 ,  H01L41/04 ,  H01L41/042 ,  H01L41/083 ,  H01L41/092

摘要： By resistor attached by a piezoelectric element, measurement with high accuracy is possible by strain of the piezoelectric element and there is not a trouble by a short, a piezoelectric actuator, the piezoelectric element and a positioning device therewith. The piezoelectric actuator includes; a piezoelectric element which is formed into an arbitrary shape, polarized in an arbitrary direction, and includes electrodes provided on at least two surfaces opposed in a thickness direction thereof; a driver power supply for applying a voltage between the electrodes to generate strain in the piezoelectric element; a driver power supply for applying a voltage to generate strain in the piezoelectric element; resistors provided on the electrodes through intermediation of insulators; and a displacement detection device connected with the resistors; The electrodes of the piezoelectric element on which the resistors are provided are set at a ground potential.

摘要翻译： 通过由压电元件附着的电阻器，可以通过压电元件的应变来进行高精度的测量，并且通过短的压电致动器，压电元件及其定位装置没有问题。 压电致动器包括： 形成任意形状的压电元件，其任意方向偏振，并且包括设置在其厚度方向上相对的至少两个表面上的电极; 用于在电极之间施加电压以在压电元件中产生应变的驱动器电源; 用于施加电压以在所述压电元件中产生应变的驱动器电源; 绝缘体通过电极设置在电极上; 以及与电阻器连接的位移检测装置; 设置有电阻器的压电元件的电极设定为接地电位。

公开(公告)号：US20060043290A1

公开(公告)日：2006-03-02

申请号：US11199290

申请日：2005-08-08

申请人： Masato Iyoki ,  Masatsugu Shigeno

发明人： Masato Iyoki ,  Masatsugu Shigeno

IPC分类号： G21K7/00

CPC分类号： G01Q60/34 ,  G01Q70/02

摘要： A scanning probe microscope having a cantilever holder is provided which gives a cantilever great amplitude by a small-sized vibrator configurable in a limited space and is stably operated even in environments of high viscous drag such as a liquid. A cantilever base part of a cantilever is fixed to a fixing part of a scanning probe microscopy cantilever holder. A vibrator is mounted on the fixing part. When it is defined that the front side is the side close to a probe and the rear side is the side close to a supporting part of the fixing part along in the longitudinal direction of the cantilever, the vibrator displaces the front and rear sides of the fixing part of the cantilever holder to each other in the opposite directions within the plane orthogonal to the sample surface to vibrate the cantilever in a liquid.

摘要翻译： 提供具有悬臂支架的扫描探针显微镜，其通过可在有限空间中配置的小尺寸振动器提供悬臂极大幅度，并且即使在诸如液体的高粘性阻力的环境中也能稳定地操作。 悬臂的悬臂底部固定在扫描探针显微镜悬臂支架的固定部分上。 振动器安装在固定部分上。 当确定前侧是靠近探头的一侧，并且后侧是沿着悬臂的纵向方向靠近固定部分的支撑部分的一侧时，振动器使前侧和后侧 将悬臂支架的一部分在与样品表面正交的平面内的相反方向彼此固定，以使悬臂在液体中振动。

公开(公告)号：US08058780B2

公开(公告)日：2011-11-15

申请号：US12378139

申请日：2009-02-11

申请人： Masato Iyoki

发明人： Masato Iyoki

IPC分类号： H01L41/04

CPC分类号： H01L41/092 ,  G01Q10/04

摘要： The cylindrical piezoelectric actuator which comprised a piezoelectric element which provided electrode in each of an inner peripheral face and an outer peripheral face which was cylindrical at least, and drive power supply to drive it. And the outer side electrode of the piezoelectric element covered the substantially circumferential outer face entirety and it was connected to a ground potential, and the electrode in the internal perimeter surface connected to drive power supply.

摘要翻译： 该圆柱形压电致动器包括一个压电元件，该压电元件至少在圆筒形的内周面和外周面中设置电极，驱动电源驱动该压电元件。 并且压电元件的外侧电极覆盖基本圆周的外表面整体，并且其连接到接地电位，并且内周边表面中的电极连接以驱动电源。