发明授权
US08169595B2 Optical apparatus and method for modifying the imaging behavior of such apparatus
有权
用于修改这种装置的成像行为的光学装置和方法
- 专利标题： Optical apparatus and method for modifying the imaging behavior of such apparatus
- 专利标题（中）： 用于修改这种装置的成像行为的光学装置和方法
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申请号： US12357126申请日： 2009-01-21
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公开(公告)号： US08169595B2公开(公告)日： 2012-05-01
- 发明人: Martin Schriever , Ulrich Wegmann , Stefan Hembacher , Bernhard Geuppert , Juergen Huber , Norbert Kerwien , Michael Totzeck , Markus Hauf
- 申请人： Martin Schriever , Ulrich Wegmann , Stefan Hembacher , Bernhard Geuppert , Juergen Huber , Norbert Kerwien , Michael Totzeck , Markus Hauf
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Fish & Richardson P.C.
- 优先权： DE102006034755 20060724
- 主分类号： G03B27/72
- IPC分类号： G03B27/72 ; G03B27/54
摘要：
The disclosure relates to an optical apparatus including a light source that emits light in the form of light pulses having a pulse frequency, and including at least one optical element. The disclosure also relates to a projection exposure machine including a pulsed light source and a projection objective, and to a method for modifying the imaging behavior of such an apparatus, such as in a projection exposure machine.
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