发明授权
US08183626B2 High-voltage MOS devices having gates extending into recesses of substrates
有权
具有延伸到衬底凹槽中的栅极的高压MOS器件
- 专利标题: High-voltage MOS devices having gates extending into recesses of substrates
- 专利标题(中): 具有延伸到衬底凹槽中的栅极的高压MOS器件
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申请号: US13027097申请日: 2011-02-14
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公开(公告)号: US08183626B2公开(公告)日: 2012-05-22
- 发明人: Chen-Liang Chu , Chun-Ting Liao , Tsung-Yi Huang , Fei-Yuh Chen
- 申请人: Chen-Liang Chu , Chun-Ting Liao , Tsung-Yi Huang , Fei-Yuh Chen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater & Matsil, L.L.P.
- 主分类号: H01L27/06
- IPC分类号: H01L27/06
摘要:
An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
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