发明授权
US08183626B2 High-voltage MOS devices having gates extending into recesses of substrates 有权
具有延伸到衬底凹槽中的栅极的高压MOS器件

High-voltage MOS devices having gates extending into recesses of substrates
摘要:
An integrated circuit structure includes a high-voltage well (HVW) region in a semiconductor substrate; a first double diffusion (DD) region in the HVW region; and a second DD region in the HVW region. The first DD region and the second DD region are spaced apart from each other by an intermediate portion of the HVW region. A recess extends from a top surface of the semiconductor substrate into the intermediate portion of the HVW region and the second DD region. A gate dielectric extends into the recess and covers a bottom of the recess. A gate electrode is over the gate dielectric. A first source/drain region is in the first DD region. A second source/drain region is in the second DD region.
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