Invention Grant
US08212357B2 Combination via and pad structure for improved solder bump electromigration characteristics
有权
组合通孔和焊盘结构,用于改善焊料凸块电迁移特性
- Patent Title: Combination via and pad structure for improved solder bump electromigration characteristics
- Patent Title (中): 组合通孔和焊盘结构,用于改善焊料凸块电迁移特性
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Application No.: US12188235Application Date: 2008-08-08
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Publication No.: US08212357B2Publication Date: 2012-07-03
- Inventor: Timothy H. Daubenspeck , Jeffrey P. Gambino , Timothy D. Sullivan
- Applicant: Timothy H. Daubenspeck , Jeffrey P. Gambino , Timothy D. Sullivan
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Richard Kotulak
- Main IPC: H01L23/488
- IPC: H01L23/488 ; H01L21/44

Abstract:
The invention generally relates to semiconductor devices, and more particularly to structures and methods for enhancing electromigration (EM) performance in solder bumps and related structures. A semiconductor structure includes a wire comprising first and second wire segments, a pad formed over the wire, and a ball limiting metallization (BLM) layer formed over the pad. The semiconductor structure also includes a solder bump formed over the BLM layer, a terminal via formed over the BLM layer, and at least one peripheral via formed between the second wire segment and the pad. The first and second wire segments are discrete wire segments.
Public/Granted literature
- US20100032835A1 COMBINATION VIA AND PAD STRUCTURE FOR IMPROVED SOLDER BUMP ELECTROMIGRATION CHARACTERISTICS Public/Granted day:2010-02-11
Information query
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