Invention Grant
US08243494B2 Self-aligned structure and method for confining a melting point in a resistor random access memory
有权
用于将熔点限制在电阻随机存取存储器中的自对准结构和方法
- Patent Title: Self-aligned structure and method for confining a melting point in a resistor random access memory
- Patent Title (中): 用于将熔点限制在电阻随机存取存储器中的自对准结构和方法
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Application No.: US12235773Application Date: 2008-09-23
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Publication No.: US08243494B2Publication Date: 2012-08-14
- Inventor: Erh-Kun Lai , ChiaHua Ho , Kuang Yeu Hsieh , Shih-Hung Chen
- Applicant: Erh-Kun Lai , ChiaHua Ho , Kuang Yeu Hsieh , Shih-Hung Chen
- Applicant Address: TW Hsinchu
- Assignee: Macronix International Co., Ltd.
- Current Assignee: Macronix International Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Kenta Suzue
- Main IPC: G11C16/02
- IPC: G11C16/02 ; H01L29/417

Abstract:
A process in the manufacturing of a resistor random access memory with a confined melting area for switching a phase change in the programmable resistive memory. The process initially formed a pillar comprising a substrate body, a first conductive material overlying the substrate body, a programmable resistive memory material overlying the first conductive material, a high selective material overlying the programmable resistive memory material, and a silicon nitride material overlying the high selective material. The high selective material in the pillar is isotropically etched on both sides of the high selective material to create a void on each side of the high selective material with a reduced length. A programmable resistive memory material is deposited in a confined area previously occupied by the reduced length of the poly, and the programmable resistive memory material is deposited into an area previously occupied by the silicon nitride material.
Public/Granted literature
- US20090020746A1 SELF-ALIGNED STRUCTURE AND METHOD FOR CONFINING A MELTING POINT IN A RESISTOR RANDOM ACCESS MEMORY Public/Granted day:2009-01-22
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