发明授权
- 专利标题: Semiconductor device and method for manufacturing the same
- 专利标题(中): 半导体装置及其制造方法
-
申请号: US12898345申请日: 2010-10-05
-
公开(公告)号: US08253144B2公开(公告)日: 2012-08-28
- 发明人: Shunpei Yamazaki , Jun Koyama , Hideki Uochi , Yasuo Nakamura , Junpei Sugao
- 申请人: Shunpei Yamazaki , Jun Koyama , Hideki Uochi , Yasuo Nakamura , Junpei Sugao
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Fish & Richardson P.C.
- 优先权: JP2009-235750 20091009
- 主分类号: H01L27/14
- IPC分类号: H01L27/14
摘要:
As for a semiconductor device which is typified by a display device, it is an object to provide a highly reliable semiconductor device to which a large-sized or high-definition screen is applicable and which has high display quality and operates stably. By using a conductive layer including Cu as a long lead wiring, an increase in wiring resistance is suppressed. Further, the conductive layer including Cu is provided in such a manner that it does not overlap with the semiconductor layer in which a channel region of a TFT is formed, and is surrounded by insulating layers including silicon nitride, whereby diffusion of Cu can be prevented; thus, a highly reliable semiconductor device can be manufactured. Specifically, a display device which is one embodiment of a semiconductor device can have high display quality and operate stably even when the size or definition thereof is increased.
公开/授权文献
信息查询
IPC分类: