发明授权
US08256774B2 Chucking member and spin head and method for chucking substrate using the chucking member
有权
夹头构件和旋转头以及使用夹紧构件夹持衬底的方法
- 专利标题： Chucking member and spin head and method for chucking substrate using the chucking member
- 专利标题（中）： 夹头构件和旋转头以及使用夹紧构件夹持衬底的方法
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申请号： US11896351申请日： 2007-08-31
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公开(公告)号： US08256774B2公开(公告)日： 2012-09-04
- 发明人: Jung Keun Cho , Kyo-Woog Koo , Bo Ram Chan Sung
- 申请人： Jung Keun Cho , Kyo-Woog Koo , Bo Ram Chan Sung
- 申请人地址： KR Chungcheongnam-do
- 专利权人： Semes Co., Ltd.
- 当前专利权人： Semes Co., Ltd.
- 当前专利权人地址： KR Chungcheongnam-do
- 代理机构： Harness, Dickey & Pierce, P.L.C.
- 优先权： KR10-2006-0087948 20060912
- 主分类号： B23B31/103
- IPC分类号： B23B31/103
摘要：
A chucking member configured to chuck the edge of a substrate includes a chucking pin which is eccentric from the rotation center. The chucking pin has a streamline shape and includes a first front-end portion disposed at the front end relative to the flow of an air current generated by the rotation of the substrate and a first back-end portion disposed at the back end relative to the flow of the air current. The first front-end portion includes a first tip, and the first front-end portion has a round shape.
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