发明授权
- 专利标题: Hybrid orientation accumulation mode GAA CMOSFET
- 专利标题(中): 混合定向累加模式GAA CMOSFET
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申请号: US12810574申请日: 2010-02-11
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公开(公告)号: US08264042B2公开(公告)日: 2012-09-11
- 发明人: Deyuan Xiao , Xi Wang , Miao Zhang , Jing Chen , Zhong Ying Xue
- 申请人: Deyuan Xiao , Xi Wang , Miao Zhang , Jing Chen , Zhong Ying Xue
- 申请人地址: CN Shanghai
- 专利权人: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
- 当前专利权人: Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences
- 当前专利权人地址: CN Shanghai
- 代理机构: Global IP Services
- 代理商 Tianhua Gu
- 优先权: CN200910199725 20091201
- 国际申请: PCT/CN2010/070636 WO 20100211
- 国际公布: WO2011/066725 WO 20110609
- 主分类号: H01L27/12
- IPC分类号: H01L27/12
摘要:
A hybrid orientation accumulation mode GAA (Gate-All-Around) CMOSFET includes a PMOS region having a first channel, an NMOS region having a second channel and a gate region. The first channel and the second channel have a racetrack-shaped cross section and are formed of p-type Si(110) and n-type Si(100), respectively; the surfaces of the first channel and the second channel are substantially surrounded by the gate region; a buried oxide layer is disposed between the PMOS region and the NMOS region and between the PMOS or NMOS region and the Si substrate to isolate them from one another. The device structure according to the prevent invention is quite simple, compact and highly integrated. In an accumulation mode, current flows through the overall racetrack-shaped channel. The disclosed device results in high carrier mobility. Meanwhile polysilicon gate depletion and short channel effects are prevented, and threshold voltage is increased.
公开/授权文献
- US20110254013A1 HYBRID ORIENTATION ACCUMULATION MODE GAA CMOSFET 公开/授权日:2011-10-20
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