Invention Grant
US08268667B2 Memory device using ion implant isolated conductive metal oxide
有权
使用离子注入隔离导电金属氧化物的存储器件
- Patent Title: Memory device using ion implant isolated conductive metal oxide
- Patent Title (中): 使用离子注入隔离导电金属氧化物的存储器件
-
Application No.: US13215895Application Date: 2011-08-23
-
Publication No.: US08268667B2Publication Date: 2012-09-18
- Inventor: Darrell Rinerson , Robin Cheung , David Hansen , Steven Longcor , Rene Meyer , Jonathan Bornstein , Lawrence Schloss
- Applicant: Darrell Rinerson , Robin Cheung , David Hansen , Steven Longcor , Rene Meyer , Jonathan Bornstein , Lawrence Schloss
- Applicant Address: US CA Sunnyvale
- Assignee: Unity Semiconductor Corporation
- Current Assignee: Unity Semiconductor Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Stolowitz Ford Cowger LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Memory cell formation using ion implant isolated conductive metal oxide is disclosed, including forming a bottom electrode below unetched conductive metal oxide layer(s), forming the unetched conductive metal oxide layer(s) including depositing at least one layer of a conductive metal oxide (CMO) material (e.g., PrCaMnOx, LaSrCoOx, LaNiOx, etc.) over the bottom electrode. At least one portion of the layer of CMO is configured to act as a memory element without etching, and performing ion implantation on portions of the layer(s) of CMO to create insulating metal oxide (IMO) regions in the layer(s) of CMO. The IMO regions are positioned adjacent to electrically conductive CMO regions in the unetched layer(s) of CMO and the electrically conductive CMO regions are disposed above and in contact with the bottom electrode and form memory elements operative to store non-volatile data as a plurality of conductivity profiles (e.g., resistive states indicative of stored data).
Public/Granted literature
- US20110315948A1 Memory Device Using Ion Implant Isolated Conductive Metal Oxide Public/Granted day:2011-12-29
Information query
IPC分类: