发明授权
- 专利标题: Copper alloy via bottom liner
- 专利标题(中): 铜合金通过底衬
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申请号: US13116622申请日: 2011-05-26
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公开(公告)号: US08294270B2公开(公告)日: 2012-10-23
- 发明人: Daniel C. Edelstein , Edward C. Cooney, III , John A. Fitzsimmons , Jeffrey P. Gambino , Anthony K. Stamper
- 申请人: Daniel C. Edelstein , Edward C. Cooney, III , John A. Fitzsimmons , Jeffrey P. Gambino , Anthony K. Stamper
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Whitham, Curtis, Christofferson & Cook, P.C.
- 代理商 Ian D. MacKinnon
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
Improved mechanical and adhesive strength and resistance to breakage of copper integrated circuit interconnections is obtained by forming a copper alloy in a copper via/wiring connection in an integrated circuit while minimizing adverse electrical effects of the alloy by confining the alloy to an interfacial region of said via/wiring connection and not elsewhere by a barrier which reduces or substantially eliminates the thickness of alloy in the conduction path. The alloy location and composition are further stabilized by reaction of all available alloying material with copper, copper alloys or other metals and their alloys.
公开/授权文献
- US20110227225A1 COPPER ALLOY VIA BOTTOM LINER 公开/授权日:2011-09-22
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