Invention Grant
- Patent Title: Acceleration sensor and method for its manufacture
- Patent Title (中): 加速度传感器及其制造方法
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Application No.: US12610961Application Date: 2009-11-02
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Publication No.: US08336382B2Publication Date: 2012-12-25
- Inventor: Johannes Classen , Arnd Kaelberer , Patrick Wellner , Dietrich Schubert , Lars Tebje
- Applicant: Johannes Classen , Arnd Kaelberer , Patrick Wellner , Dietrich Schubert , Lars Tebje
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102008043524 20081106
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
Public/Granted literature
- US20100107762A1 ACCELERATION SENSOR AND METHOD FOR ITS MANUFACTURE Public/Granted day:2010-05-06
Information query
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