Invention Grant
- Patent Title: Combined pumping system comprising a getter pump and an ion pump
- Patent Title (中): 组合泵送系统，包括吸气泵和离子泵
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Application No.: US12920797Application Date: 2009-03-26
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Publication No.: US08342813B2Publication Date: 2013-01-01
- Inventor: Michael Laurence Ferris , Andrea Conte
- Applicant: Michael Laurence Ferris , Andrea Conte
- Applicant Address: IT Lainate (MI)
- Assignee: Saes Getters S.p.A.
- Current Assignee: Saes Getters S.p.A.
- Current Assignee Address: IT Lainate (MI)
- Agency: Steinfl & Bruno LLP
- Priority: ITMI20080112U 20080328; ITM120080250U 20080801
- International Application: PCT/EP2009/053634 WO 20090326
- International Announcement: WO2009/118398 WO 20091001
- Main IPC: F04B37/02
- IPC: F04B37/02 ; F04F99/00
Abstract:
A combined pumping system comprises a getter pump and an ion pump. The getter and ion pumps are mounted on a same flange and are arranged on the same side of the flange at two different points thereof. The flange can be mounted to a vacuum chamber, such that the combined pumping system evacuates the vacuum chamber.
Public/Granted literature
- US20110014063A1 COMBINED PUMPING SYSTEM COMPRISING A GETTER PUMP AND AN ION PUMP Public/Granted day:2011-01-20
Information query
