发明授权
US08345262B2 Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface
有权
用于确定实际形状与光学表面的期望形状的偏差的方法和装置
- 专利标题： Method and apparatus for determining a deviation of an actual shape from a desired shape of an optical surface
- 专利标题（中）： 用于确定实际形状与光学表面的期望形状的偏差的方法和装置
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申请号： US13361442申请日： 2012-01-30
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公开(公告)号： US08345262B2公开(公告)日： 2013-01-01
- 发明人: Frank Schillke , Rolf Freimann , Matthias Dreher
- 申请人： Frank Schillke , Rolf Freimann , Matthias Dreher
- 申请人地址： DE Oberkochen
- 专利权人： Carl Zeiss SMT GmbH
- 当前专利权人： Carl Zeiss SMT GmbH
- 当前专利权人地址： DE Oberkochen
- 代理机构： Sughrue Mion, PLLC
- 优先权： DE102006035022 20060728
- 主分类号： G01B11/02
- IPC分类号： G01B11/02
摘要：
An optical element having an optical surface (12; 103), which optical surface has an actual shape, the actual shape deviating from a desired shape by maximum 0.2 nm, wherein the desired shape is either: a free-form surface having a deviation from its best-fitting sphere of at least 5 μm or a substantially rotationally symmetrical surface having a deviation from its best-fitting sphere of at least 0.5 mm.