发明授权
US08350343B2 Field effect transistor with channel region edge and center portions having different band structures for suppressed corner leakage
有权
场效应晶体管,沟道区域边缘和中心部分具有不同的带结构,用于抑制拐角泄漏
- 专利标题: Field effect transistor with channel region edge and center portions having different band structures for suppressed corner leakage
- 专利标题(中): 场效应晶体管,沟道区域边缘和中心部分具有不同的带结构,用于抑制拐角泄漏
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申请号: US13362019申请日: 2012-01-31
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公开(公告)号: US08350343B2公开(公告)日: 2013-01-08
- 发明人: Brent A. Anderson , Edward J. Nowak
- 申请人: Brent A. Anderson , Edward J. Nowak
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: GIbb & Riley, LLC
- 代理商 Anthony J. Canale
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
Disclosed are embodiments of field effect transistors (FETs) having suppressed sub-threshold corner leakage, as a function of channel material band-edge modulation. Specifically, the FET channel region is formed with different materials at the edges as compared to the center. Different materials with different band structures and specific locations of those materials are selected in order to effectively raise the threshold voltage (Vt) at the edges of the channel region relative to the Vt at the center of the channel region and, thereby to suppress of sub-threshold corner leakage. Also disclosed are design structures for such FETs and method embodiments for forming such FETs.
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