发明授权
- 专利标题: Method to electrodeposit metals using ionic liquids
- 专利标题(中): 使用离子液体电沉积金属的方法
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申请号: US12279517申请日: 2007-02-12
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公开(公告)号: US08361300B2公开(公告)日: 2013-01-29
- 发明人: Boris Kuzmanovic , Cornelis Johannes Govardus Van Strien , Colin Eric Bartel , Michael Zeitler , Johanna Christina Speelman
- 申请人: Boris Kuzmanovic , Cornelis Johannes Govardus Van Strien , Colin Eric Bartel , Michael Zeitler , Johanna Christina Speelman
- 申请人地址: NL Arnhem
- 专利权人: Akzo Nobel N.V.
- 当前专利权人: Akzo Nobel N.V.
- 当前专利权人地址: NL Arnhem
- 代理机构: Norris McLaughlin & Marcus PA
- 优先权: EP06101714 20060215
- 国际申请: PCT/EP2007/051329 WO 20070212
- 国际公布: WO2007/093574 WO 20070823
- 主分类号: C25D3/00
- IPC分类号: C25D3/00
摘要:
The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid is selected from the group of N+R1R2R3R4 X− or N+R5R6R7R8 Y− is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal anode is used as the metal source, wherein any one of R1 to R8 independently represents a hydrogen, alkyl, cycloalkyl, aryl, or aralkyl group that may be substituted with a group selected from OH, Cl, Br, F, I, phenyl, NH2, CN, NO2, COOR9, CHO, COR9, or OR9, at least one of R5 to R8 is a fatty alkyl chain, and one or more of R5 to R8 can be a (poly)oxyalkylene group wherein the alkylene is a C1 to C4 alkylene and the total number of oxyalkylene units can be from 1 to 50 oxyalkylene units, and at least one of R1 to R8 is a C1 to C4 alkyl chain, R9 is an alkyl or cycloalkyl group, X− is an anion having an N-acyl sulphonylimide anion (—CO—N−—SO2—) functionality, Y− is an anion compatible with the N+R5R6R7R8 ammonium cation, such as a halogenide anion, a carboxylate anion, a sulphate (both organic and inorganic sulphate), sulphonate, carbonate, nitrate, nitrite, thiocyanate, hydroxide, or sulphonylimide anion.
公开/授权文献
- US20090236227A1 METHOD TO ELECTRODEPOSIT METALS USING IONIC LIQUIDS 公开/授权日:2009-09-24
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