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    Method to electrodeposit metals using ionic liquids
    1.
    发明授权
    Method to electrodeposit metals using ionic liquids 失效
    使用离子液体电沉积金属的方法

    公开(公告)号：US08361300B2

    公开(公告)日：2013-01-29

    申请号：US12279517

    申请日：2007-02-12

    申请人： Boris Kuzmanovic ,  Cornelis Johannes Govardus Van Strien ,  Colin Eric Bartel ,  Michael Zeitler ,  Johanna Christina Speelman

    发明人： Boris Kuzmanovic ,  Cornelis Johannes Govardus Van Strien ,  Colin Eric Bartel ,  Michael Zeitler ,  Johanna Christina Speelman

    IPC分类号： C25D3/00

    CPC分类号： C25D3/665

    摘要： The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid is selected from the group of N+R1R2R3R4 X− or N+R5R6R7R8 Y− is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal anode is used as the metal source, wherein any one of R1 to R8 independently represents a hydrogen, alkyl, cycloalkyl, aryl, or aralkyl group that may be substituted with a group selected from OH, Cl, Br, F, I, phenyl, NH2, CN, NO2, COOR9, CHO, COR9, or OR9, at least one of R5 to R8 is a fatty alkyl chain, and one or more of R5 to R8 can be a (poly)oxyalkylene group wherein the alkylene is a C1 to C4 alkylene and the total number of oxyalkylene units can be from 1 to 50 oxyalkylene units, and at least one of R1 to R8 is a C1 to C4 alkyl chain, R9 is an alkyl or cycloalkyl group, X− is an anion having an N-acyl sulphonylimide anion (—CO—N−—SO2—) functionality, Y− is an anion compatible with the N+R5R6R7R8 ammonium cation, such as a halogenide anion, a carboxylate anion, a sulphate (both organic and inorganic sulphate), sulphonate, carbonate, nitrate, nitrite, thiocyanate, hydroxide, or sulphonylimide anion.

    摘要翻译： 本发明涉及一种在基板上电镀或电解金属的方法，其中离子液体选自N + R1R2R3R4X-或N + R5R6R7R8Y-的组，用作电解质，并将金属盐加入到离子 使用液体作为金属源或使用金属阳极作为金属源，其中R 1至R 8中的任何一个独立地表示可以被选自下列基团的氢，烷基，环烷基，芳基或芳烷基取代：OH， Cl，Br，F，I，苯基，NH2，CN，NO2，COOR9，CHO，COR9或OR9，R5至R8中的至少一个为脂肪烷基链，R5至R8中的一个或多个可为（ 聚）氧化烯基，其中亚烷基是C1-C4亚烷基，氧化烯单元的总数可以是1至50个氧化烯单元，并且R 1至R 8中的至少一个是C 1至C 4烷基链，R 9是烷基或 环烷基，X-是具有N-酰基磺酰亚胺阴离子（-CO-N-SO 2 - ）官能团的阴离子，Y-是阴离子 与N + R5R6R7R8铵阳离子如卤化物阴离子，羧酸根阴离子，硫酸盐（有机和无机硫酸盐），磺酸盐，碳酸盐，硝酸盐，亚硝酸盐，硫氰酸盐，氢氧化物或磺酰亚胺阴离子相容。

    METHOD TO ELECTRODEPOSIT METALS USING IONIC LIQUIDS
    2.
    发明申请
    METHOD TO ELECTRODEPOSIT METALS USING IONIC LIQUIDS 失效
    使用离子液体电沉积金属的方法

    公开(公告)号：US20090236227A1

    公开(公告)日：2009-09-24

    申请号：US12279517

    申请日：2007-02-12

    申请人： Boris Kuzmanovic ,  Cornelis Johannes Govardus Van Strien ,  Colin Eric Bartel ,  Michael Zeitler ,  Johanna Christina Speelman

    发明人： Boris Kuzmanovic ,  Cornelis Johannes Govardus Van Strien ,  Colin Eric Bartel ,  Michael Zeitler ,  Johanna Christina Speelman

    IPC分类号： C25D5/00 ,  C25F3/16

    CPC分类号： C25D3/665

    摘要： The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid selected from the group of N+R1R2R3R4X− or N+R5R6R7R8Y− is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal anode is used as the metal source, wherein any one of R1 to R8 independently represents a hydrogen, alkyl, cycloalkyl, aryl, or aralkyl group that may be substituted with a group selected from OH, Cl, Br, F, I, phenyl, NH2, CN, NO2, COOR9, CHO, COR9, or OR9, at least one of R5 to R8 is a fatty alkyl chain, and one or more of R5 to R8 can be a (poly)oxyalkylene group wherein the alkylene is a C1 to C4 alkylene and the total number of oxyalkylene units can be from 1 to 50 oxyalkylene units, and at least one of R1 to R8 is a C1 to C4 alkyl chain, R9 is an alkyl or cycloalkyl group, X- is an anion having an N-acyl sulphonylimide anion (—CO—N−—SO2—) functionality, Y− is an anion compatible with the N+R5R6R7R8 ammonium cation, such as a halogenide anion, a carboxylate anion, a sulphate (both organic and inorganic sulphate), sulphonate, carbonate, nitrate, nitrite, thiocyanate, hydroxide, or sulphonylimide anion.

    摘要翻译： 本发明涉及一种在基板上电镀或电解金属的方法，其中使用选自N + R1R2R3R4X-或N + R5R6R7R8Y-的离子液体作为电解质，并且使用添加到离子液体中的金属盐 由于金属源或金属阳极用作金属源，其中R 1至R 8中的任一个独立地表示可以被选自OH，Cl，Br的基团取代的氢，烷基，环烷基，芳基或芳烷基 ，F，I，苯基，NH2，CN，NO2，COOR9，CHO，COR9或OR9，R5至R8中的至少一个为脂肪烷基链，R5至R8中的一个或多个可为（聚）氧化烯 基团，其中亚烷基是C1-C4亚烷基，氧化烯单元的总数可以是1至50个氧化烯单元，并且R 1至R 8中的至少一个是C 1至C 4烷基链，R 9是烷基或环烷基， X-是具有N-酰基磺酰亚胺阴离子（-CO-N-SO 2 - ）官能团的阴离子，Y-是与N + R5R相容的阴离子 6R7R8铵阳离子，如卤化物阴离子，羧酸根阴离子，硫酸盐（有机和无机硫酸盐），磺酸盐，碳酸盐，硝酸盐，亚硝酸盐，硫氰酸盐，氢氧化物或磺酰亚胺阴离子。