发明授权
- 专利标题: Mechanical-quantity measuring device
- 专利标题(中): 机械量测量装置
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申请号: US13177185申请日: 2011-07-06
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公开(公告)号: US08365609B2公开(公告)日: 2013-02-05
- 发明人: Hiromi Shimazu , Hiroyuki Ohta , Yohei Tanno
- 申请人: Hiromi Shimazu , Hiroyuki Ohta , Yohei Tanno
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Kilpatrick Townsend & Stockton LLP
- 优先权: JP2006-089834 20060329
- 主分类号: G01L1/18
- IPC分类号: G01L1/18 ; G01L1/22
摘要:
A mechanical-quantity measuring device capable of measuring a strain component in a specific direction with high precision is provided.At least two or more pairs of bridge circuits are formed inside a semiconductor monocrystal substrate and a semiconductor chip, and one of these bridge circuits forms a n-type diffusion resistor in which a direction of a current flow and measuring variation of a resistor value are in parallel with a direction of the semiconductor monocryastal silicon substrate, and an another bridge circuit is composed of combination of p-type diffusion resistors in parallel with a direction.
公开/授权文献
- US20110259112A1 Mechanical-Quantity Measuring Device 公开/授权日:2011-10-27
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