Invention Grant
- Patent Title: High-intensity electromagnetic radiation apparatus and methods
- Patent Title (中): 高强度电磁辐射装置及方法
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Application No.: US12835589Application Date: 2010-07-13
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Publication No.: US08384274B2Publication Date: 2013-02-26
- Inventor: David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
- Applicant: David Malcolm Camm , Chee Chin , Rick Doolan , Tony Hewett , Arne Kjorvel , Tony Komasa , Mike Krasnich , Steve McCoy , Joseph Reyers , Igor Rudic , Ludmila Shepelev , Greg Stuart , Tilman Thrum , Alex Viel
- Applicant Address: US CA Freemont
- Assignee: Mattson Technology, Inc.
- Current Assignee: Mattson Technology, Inc.
- Current Assignee Address: US CA Freemont
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: H01J61/52
- IPC: H01J61/52 ; H01J1/02

Abstract:
An apparatus for producing electromagnetic radiation includes a flow generator configured to generate a flow of liquid along an inside surface of an envelope, first and second electrodes configured to generate an electrical arc within the envelope to produce the electromagnetic radiation, and an exhaust chamber extending outwardly beyond one of the electrodes, configured to accommodate a portion of the flow of liquid. In another aspect, the flow generator is electrically insulated. In another aspect, the electrodes are configured to generate an electrical discharge pulse to produce an irradiance flash, and the apparatus includes a removal device configured to remove particulate contamination from the liquid, the particulate contamination being released during the flash and being different than that released by the electrodes during continuous operation.
Public/Granted literature
- US20100276611A1 HIGH-INTENSITY ELECTROMAGNETIC RADIATION APPARATUS AND METHODS Public/Granted day:2010-11-04
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