发明授权
- 专利标题: Molecular pump and flange having shock absorbing member
- 专利标题(中): 分子泵和法兰具有减震构件
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申请号: US12225041申请日: 2007-03-15
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公开(公告)号: US08403652B2公开(公告)日: 2013-03-26
- 发明人: Yasushi Maejima , Yoshinobu Ohtachi , Rumiko Wada , Yoshihiro Enomoto , Chris Bailey , Dawn Stephenson , Kate Wilson
- 申请人: Yasushi Maejima , Yoshinobu Ohtachi , Rumiko Wada , Yoshihiro Enomoto , Chris Bailey , Dawn Stephenson , Kate Wilson
- 申请人地址: JP Chiba
- 专利权人: Edwards Japan Limited
- 当前专利权人: Edwards Japan Limited
- 当前专利权人地址: JP Chiba
- 优先权: JP2006-71722 20060315; JP2006-167968 20060616
- 国际申请: PCT/JP2007/055172 WO 20070315
- 国际公布: WO2007/105785 WO 20070920
- 主分类号: F04D19/04
- IPC分类号: F04D19/04
摘要:
A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.
公开/授权文献
- US20090081056A1 Molecular Pump And Flange 公开/授权日:2009-03-26
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