公开(公告)号：US20110103934A1

公开(公告)日：2011-05-05

申请号：US12999137

申请日：2009-07-14

申请人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

发明人： Yoshinobu Ohtachi ,  Manabu Nabaka ,  Yasushi Maejima

IPC分类号： F04B49/00

CPC分类号： F04D19/042 ,  F04D27/001 ,  F04D27/0292 ,  F04D29/661 ,  F05D2260/607

摘要： Provided is a vacuum pump which can detect precisely physical contact between a rotor portion and a stator portion, and contact between the rotor portion and the stator portion that occurs as the amount of deposited solid product reaches the clearance between the rotor portion and the stator portion.A vibration sensor is provided, taking advantage of a clearance, at the outer peripheral of a thread groove spacer. Contact between the rotor portion and the stator portion is decided, when a particular vibration during contact between the rotor portion and the stator portion exceeds a predetermined threshold value. The vibration sensor is mounted on the outer peripheral of the thread groove spacer at the end of the side of an exhaust port. The thread groove spacer is fixed on a casing via an elastic member (an O-ring) that have a vibration absorption (vibration damping) function of a cutoff frequency (fc1). A vibration signal outputted from the vibration sensor is converted into a digital vibration signal, and is inputted to a digital filter having a passing band of fc1 to fc2 [Hz]. If the vibration level of the vibration signal having passed through the digital filter exceeds a predetermined threshold value, it is detected that contact between the rotor portion and the stator portion has occurred in a turbo-molecular pump.

摘要翻译： 提供一种真空泵，其可精确地检测转子部分和定子部分之间的物理接触，以及转子部分和定子部分之间的接触，其随着沉积的固体产物的量达到转子部分和定子部分之间的间隙而发生 。 在螺纹槽间隔件的外周设有利用间隙的振动传感器。 当转子部分和定子部分之间的接触期间的特定振动超过预定阈值时，决定转子部分和定子部分之间的接触。 振动传感器安装在排气口侧端部的螺纹槽隔离件的外周上。 螺纹槽间隔件通过具有截止频率（fc1）的振动吸收（减振）功能的弹性部件（O形环）固定在壳体上。 从振动传感器输出的振动信号被转换为数字振动信号，并被输入到具有通过频带fc1至fc2 [Hz]的数字滤波器。 如果通过数字滤波器的振动信号的振动水平超过预定阈值，则检测到在涡轮分子泵中发生了转子部分和定子部分之间的接触。

公开(公告)号：US20090081056A1

公开(公告)日：2009-03-26

申请号：US12225041

申请日：2007-03-15

申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/60 ,  F16L19/03

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

摘要： To form a shock absorbing structure more easily.A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation. By this plastic deformation of the shock absorbing member, the energy for rotating the molecular pump is consumed, so that a shock produced in the molecular pump can be absorbed.

摘要翻译： 更容易形成减震结构。 在分子泵的凸缘上设有用于消耗冲击能量的减震结构。 在凸缘中设置有插入孔，并且将由独立且小的部分形成的冲击吸收部件嵌合并固定在该插入孔中。 提供螺栓孔以使得用于固定凸缘的螺栓和冲击吸收构件中的真空容器通过。 冲击吸收构件通过形成空腔部分而设置有薄壁部分。 在分子泵中产生转子部分的旋转方向的冲击，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。 因此，将凸缘固定到真空泵的凸缘上的螺栓撞击减震构件，从而冲击吸收构件受到塑性变形。 通过冲击吸收构件的塑性变形，消耗了分子泵旋转的能量，从而可以吸收分子泵产生的冲击。

公开(公告)号：US20070031270A1

公开(公告)日：2007-02-08

申请号：US10571642

申请日：2004-08-27

申请人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

发明人： Yasushi Maejima ,  Yutaka Inayoshi ,  Shinji Kawanishi ,  Kou Sakurai ,  Hiroyuki Suda ,  Takesi Akimoto

IPC分类号： F04D19/04 ,  F04B17/00

CPC分类号： F04D19/042 ,  F04D19/04 ,  F04D29/266

摘要： Provided are a fixing structure for fixing a rotor to a rotor shaft, in which the contact state of the contact surfaces of the rotor shaft and the rotor is stabilized to thereby maintain the rotation balance of the rotor shaft and the rotor, making it possible to prevent oscillation, and a turbo molecular pump having such a fixing structure. On the outer peripheral portion of the upper surface of a fastening portion (253), there is concentrically formed a rotor shaft (213) side contact surface (257) to be brought into contact with a rotor (103). Further, in the inner periphery of the contact surface (257), there is formed a spot facing portion (259) whose upper surface is recessed from the contact surface (257). Thus, when the rotor shaft (213) is fastened to the rotor (103), there is formed, at the portion where the spot facing portion (259) is formed, a gap (265) which has a depth corresponding to the depth of the spot facing portion (259) and which is between the contact surface (187) of the rotor (103) and the spot facing portion (259).

摘要翻译： 提供了一种用于将转子固定到转子轴的固定结构，其中转子轴和转子的接触表面的接触状态稳定，从而保持转子轴和转子的旋转平衡，使得可以 防止振动，以及具有这种固定结构的涡轮分子泵。 在紧固部（253）的上表面的外周部上同心地形成与转子（103）接触的转子轴（213）侧接触面（257）。 此外，在接触面（257）的内周形成有上表面从接触面（257）凹陷的光斑对置部（259）。 因此，当转子轴（213）紧固到转子（103）时，在形成有点对面部分（259）的部分形成有与深度相对应的深度的间隙（265） 位于转子（103）的接触表面（187）和光斑对向部分（259）之间的光斑对置部分（259）。

公开(公告)号：US06854956B2

公开(公告)日：2005-02-15

申请号：US10387058

申请日：2003-03-12

申请人： Tooru Miwata ,  Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Tooru Miwata ,  Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/52 ,  F04D29/60 ,  F16B2/06 ,  F16B5/06 ,  F01D1/36

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/601

摘要： A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.

摘要翻译： 涡轮分子泵具有主体和用于覆盖主体的泵壳体。 第一凸缘与泵壳一体地形成，用于与真空室一体地连接到第二凸缘。 泵壳的法兰和真空室的法兰通过紧固螺栓一体连接在一起。 夹持结构通过围绕第一和第二凸缘中的每一个的一部分而将第一和第二凸缘分别夹紧在一起。

公开(公告)号：US06824349B2

公开(公告)日：2004-11-30

申请号：US10294829

申请日：2002-11-14

申请人： Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Satoshi Okudera ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D29/601

摘要： A vacuum pump is removably connected to the underside of a chamber for exhausting gas molecules from the chamber. The vacuum pump has a pump case having a flange extending circumferentially around a top portion thereof, a suction port and an exhaust port. Stator blades are fixedly mounted within the pump case, and a rotor is rotatably mounted in the pump case and has rotor blades alternately disposed with respect to the stator blades. A driving motor rotationally drives the rotor so that the rotating rotor blades coact with the stator blades to evacuate gas molecules from the chamber and pump the gas molecules from the suction port to the exhaust port. Bolt insertion holes are formed in the flange and each hole has a smaller diameter portion opening at a lower surface of the flange and a larger diameter portion opening at an upper surface of the flange which faces the underside of the chamber. Bolts extend through respective ones of the bolt insertion holes for removably connecting the flange of the pump case to the underside of the chamber, and buffer members are disposed in respective ones of the bolt insertion holes and surround at least a portion of the corresponding bolt in the region between the upper and lower surfaces of the flange.

摘要翻译： 真空泵可拆卸地连接到室的下侧，用于从室排出气体分子。 真空泵具有泵壳体，其具有围绕其顶部周向延伸的凸缘，吸入口和排气口。 定子叶片固定地安装在泵壳内，并且转子可旋转地安装在泵壳体中并具有相对于定子叶片交替设置的转子叶片。 驱动电动机旋转地驱动转子，使得旋转的转子叶片与定子叶片共同作用以从气室排出气体分子并将气体分子从吸入口泵送到排气口。 螺栓插入孔形成在凸缘中，并且每个孔在凸缘的下表面处具有较小的直径部分开口，并且在凸缘的上表面处面向腔室下侧的较大直径部分开口。 螺栓延伸通过相应的螺栓插入孔，用于将泵壳的凸缘可拆卸地连接到室的下侧，并且缓冲构件设置在相应的螺栓插入孔中并且围绕相应的螺栓的至少一部分 凸缘的上表面和下表面之间的区域。

公开(公告)号：US06814536B2

公开(公告)日：2004-11-09

申请号：US10294827

申请日：2002-11-14

申请人： Yoshiyuki Sakaguchi ,  Yasushi Maejima

发明人： Yoshiyuki Sakaguchi ,  Yasushi Maejima

IPC分类号： F04D1904

CPC分类号： F04D19/04 ,  F04D27/0292 ,  F04D29/522

摘要： The present invention provides a vacuum pump which reduces a damaging torque produced when a rotor rotating at high-speed crashes into a screw stator or the like. The vacuum pump has a rigid ring disposed around the screw stator such that a shock load from the screw stator causes the rigid ring to rotate. When a brittle facture occurs in the rotor rotating at high-speed, for example, and a part of the rotor crashes into the screw stator, a rotating torque, i.e., a damaging torque causing the entire vacuum pump to rotate is likely to occur. However, this damaging torque is absorbed by the rotation of the rigid ring and eventually subsides.

公开(公告)号：US06752588B2

公开(公告)日：2004-06-22

申请号：US10294828

申请日：2002-11-14

申请人： Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima ,  Satoshi Okudera

发明人： Shinji Kawanishi ,  Yoshiyuki Sakaguchi ,  Yasushi Maejima ,  Satoshi Okudera

IPC分类号： F04D1904

CPC分类号： F04D29/644 ,  F04D19/04 ,  F04D27/0292 ,  F04D29/601

摘要： The present invention provides a vacuum pump in which a damaging torque produced when a rotating rotor crashes into the inner wall of a pump case, is prevented to transfer to a vacuum chamber so as to protect the vacuum chamber. Bolt-holes of flange portions, through which the vacuum pump and the vacuum chamber and also the pump case and a base member disposed below the pump case are fastened, respectively, are formed so as to have larger diameters than the shank diameters of corresponding bolts by 20% or more. With this arrangement, when the entire vacuum turns moved by the damaging torque, the pump case slips relative to the vacuum chamber and the base member by the gaps between the pump case-base member fastening bolt-holes and the pump case-base member fastening bolts. As a result, the damaging torque is absorbed and is prevented to transfer to the vacuum chamber.

摘要翻译： 本发明提供了一种真空泵，其中当旋转的转子撞到泵壳的内壁时产生的损坏扭矩被阻止转移到真空室以保护真空室。 分别固定真空泵和真空室以及泵壳和设置在泵壳下方的底座部件的法兰部分的螺栓孔形成为具有比相应螺栓的柄直径更大的直径 减少20％以上。 通过这种布置，当整个真空通过损坏转矩转动时，泵壳体通过泵壳体 - 基件构件紧固螺栓孔和泵壳体 - 基座构件紧固件之间的间隙相对于真空室和基座构件滑动 螺栓 结果，损坏的扭矩被吸收并被阻止转移到真空室。

公开(公告)号：US08403652B2

公开(公告)日：2013-03-26

申请号：US12225041

申请日：2007-03-15

申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

IPC分类号： F04D19/04

CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

摘要： A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.

摘要翻译： 分子泵具有圆筒形壳体，形成在壳体中的定子部分，设置在定子部分中的轴，相对于定子部分枢转地支撑轴的轴承，转子，其附接到轴并与其一体旋转 轴，用于旋转地驱动轴的电动机，减震构件和设置在壳体的端部处的凸缘部。 凸缘部分具有螺栓孔，通过该螺栓孔将用于固定壳体和固定构件的螺栓彼此延伸，以及插入孔，其邻近螺栓孔设置并且其中缓冲构件插入其中，使得至少一端 沿着螺栓的轴向延伸的减震构件的侧面与螺栓间隔开。

公开(公告)号：US20120143390A1

公开(公告)日：2012-06-07

申请号：US13381254

申请日：2010-06-14

申请人： Tooru Miwata ,  Keiichi Ishii ,  Katsuhide Machida ,  Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

发明人： Tooru Miwata ,  Keiichi Ishii ,  Katsuhide Machida ,  Yoshinobu Ohtachi ,  Yasushi Maejima ,  Tsutomu Takaada

IPC分类号： G05D23/00

CPC分类号： F04D19/042 ,  F04D27/001 ,  F04D29/584 ,  F05D2270/303

摘要： To provide a vacuum pump capable of performing temperature control using one or more heating devices or cooling devices fewer than the number of temperature sensors arranged in the pump.One temperature sensor is arranged for each target in the pump, while only one set consisting of a heater 147 and a magnetic valve 163 is arranged. One set consisting of a heater and a magnetic valve is controlled based on output signals from a plurality of temperature sensors, based on the priorities set for the temperature sensors. As stated above, by setting priorities for the temperature sensors, the temperature of a target provided with a temperature sensor given a higher priority is settled within a control range by performing quick ON/OFF control, and then the temperature of a target provided with a temperature sensor given a lower priority is settled within the control range.

摘要翻译： 提供一种能够使用少于配置在泵中的温度传感器的数量的一个或多个加热装置或冷却装置进行温度控制的真空泵。 在泵中为每个目标设置一个温度传感器，而仅设置由加热器147和电磁阀163组成的一个。 基于为温度传感器设定的优先级，基于来自多个温度传感器的输出信号来控制由加热器和电磁阀组成的一组。 如上所述，通过设定温度传感器的优先级，通过进行快速ON / OFF控制，将设置有较高优先级的温度传感器的目标温度设定在控制范围内，然后设置具有 给定较低优先级的温度传感器在控制范围内确定。

公开(公告)号：US20060140776A1

公开(公告)日：2006-06-29

申请号：US10566774

申请日：2004-08-03

申请人： Satoshi Okudera ,  Yasushi Maejima ,  Yoshiyuki Sakaguchi

发明人： Satoshi Okudera ,  Yasushi Maejima ,  Yoshiyuki Sakaguchi

IPC分类号： F04B49/10

CPC分类号： F04D19/042 ,  F04D25/06 ,  F04D29/5806 ,  F04D29/584

摘要： The present invention is to provide a vacuum pump in which an electrical equipment section for rotating a rotor is efficiently cooled so as to maintain in proper temperature, and further several types pumps capable of using common vacuum pump components even for a vacuum pump having a different size and shape though having same structure, and to make the vacuum pump components common. A vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor, wherein a cooling water pipe is buried in the wall of a stator column which includes an electrical equipment section for rotating the rotor and is formed integrally with a base, said cooling water pipe having a branched water inlet port and a branched outlet port and being provided just near the electrical equipment section arranged near the center of the vacuum pump. Another vacuum pump according to the present invention, which generates vacuum by sucking and discharging a gas with rotation of a rotor with rotor blades, wherein the pump case is supported by a flange of a thread pump stator and the cooling water pipe is buried in the wall of the stator column.

摘要翻译： 本发明提供一种真空泵，其中用于旋转转子的电气设备部分被有效地冷却以保持适当的温度，并且还有几种泵能够使用普通真空泵部件，甚至对于具有不同的真空泵的真空泵 尺寸和形状虽然具有相同的结构，并使真空泵组件相同。 根据本发明的真空泵，其通过转子的旋转吸取和排出气体而产生真空，其中冷却水管被埋在定子柱的壁中，该定子柱包括用于旋转转子的电气设备部分，并且是 与基座一体形成，所述冷却水管具有分支水入口和分支出口，并且设置在靠近真空泵中心附近的电气设备部分附近。 根据本发明的另一个真空泵，其通过用转子叶片的转子旋转抽吸和排出气体而产生真空，其中泵壳由螺纹泵定子的凸缘支撑，冷却水管被埋在 定子柱的壁。