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    Molecular pump and flange having shock absorbing member
    1.
    发明授权
    Molecular pump and flange having shock absorbing member 有权
    分子泵和法兰具有减震构件

    公开(公告)号：US08403652B2

    公开(公告)日：2013-03-26

    申请号：US12225041

    申请日：2007-03-15

    申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

    发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

    IPC分类号： F04D19/04

    CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

    摘要： A molecular pump has a cylindrical casing, a stator portion formed in the casing, a shaft disposed in the stator portion, a bearing pivotally supporting the shaft with respect to the stator portion, a rotor that is attached to the shaft and rotates integrally with the shaft, a motor for rotationally driving the shaft, a shock absorbing member, and a flange portion provided at an end portion of the casing. The flange portion has a bolt hole through which extends a bolt for fixing the casing and a fixed member to each other and an insertion hole which is provided adjacent to the bolt hole and in which the shock absorbing member is inserted so that at least one end side of the shock absorbing member extending along an axial direction of the bolt is spaced apart from the bolt.

    摘要翻译： 分子泵具有圆筒形壳体，形成在壳体中的定子部分，设置在定子部分中的轴，相对于定子部分枢转地支撑轴的轴承，转子，其附接到轴并与其一体旋转 轴，用于旋转地驱动轴的电动机，减震构件和设置在壳体的端部处的凸缘部。 凸缘部分具有螺栓孔，通过该螺栓孔将用于固定壳体和固定构件的螺栓彼此延伸，以及插入孔，其邻近螺栓孔设置并且其中缓冲构件插入其中，使得至少一端 沿着螺栓的轴向延伸的减震构件的侧面与螺栓间隔开。

    Molecular Pump And Flange
    2.
    发明申请
    Molecular Pump And Flange 有权
    分子泵和法兰

    公开(公告)号：US20090081056A1

    公开(公告)日：2009-03-26

    申请号：US12225041

    申请日：2007-03-15

    申请人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

    发明人： Yasushi Maejima ,  Yoshinobu Ohtachi ,  Rumiko Wada ,  Yoshihiro Enomoto ,  Chris Bailey ,  Dawn Stephenson ,  Kate Wilson

    IPC分类号： F04D19/04 ,  F04D27/02 ,  F04D29/60 ,  F16L19/03

    CPC分类号： F04D19/042 ,  F04D27/0292 ,  F04D29/522 ,  F04D29/601 ,  F04D29/644

    摘要： To form a shock absorbing structure more easily.A shock absorbing structure for consuming shock energy is provided on the flange of a molecular pump. An insertion hole is provided in the flange, and a shock absorbing member formed by an independent and small part is fitted and fixed in this insertion hole. A bolt hole is provided to cause a bolt for fixing the flange and a vacuum vessel in the shock absorbing member to pass therethrough. The shock absorbing member is provided with a thin-wall portion by forming a cavity portion. In the case where a shock in the rotation direction of a rotor portion is produced in the molecular pump, for example, by fracture of the rotor portion, the flange slides in the rotation direction of the rotor portion together with the molecular pump. Thus, the bolt that fixes the flange to the flange of the vacuum pump hits the shock absorbing member, thereby the shock absorbing member is subjected to plastic deformation. By this plastic deformation of the shock absorbing member, the energy for rotating the molecular pump is consumed, so that a shock produced in the molecular pump can be absorbed.

    摘要翻译： 更容易形成减震结构。 在分子泵的凸缘上设有用于消耗冲击能量的减震结构。 在凸缘中设置有插入孔，并且将由独立且小的部分形成的冲击吸收部件嵌合并固定在该插入孔中。 提供螺栓孔以使得用于固定凸缘的螺栓和冲击吸收构件中的真空容器通过。 冲击吸收构件通过形成空腔部分而设置有薄壁部分。 在分子泵中产生转子部分的旋转方向的冲击，例如通过转子部分的断裂，凸缘与分子泵一起在转子部分的旋转方向上滑动。 因此，将凸缘固定到真空泵的凸缘上的螺栓撞击减震构件，从而冲击吸收构件受到塑性变形。 通过冲击吸收构件的塑性变形，消耗了分子泵旋转的能量，从而可以吸收分子泵产生的冲击。

    Wide range pressure control using turbo pump
    3.
    发明申请
    Wide range pressure control using turbo pump 有权
    使用涡轮泵进行宽范围压力控制

    公开(公告)号：US20070079758A1

    公开(公告)日：2007-04-12

    申请号：US11245797

    申请日：2005-10-07

    申请人： Peter Holland ,  Kate Wilson ,  Dawn Stephenson

    发明人： Peter Holland ,  Kate Wilson ,  Dawn Stephenson

    IPC分类号： B32B27/04 ,  C23C16/00

    CPC分类号： C23C16/4412 ,  C23C16/45557 ,  F04D19/042 ,  F04D27/0253

    摘要： The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

    摘要翻译： 本发明是一种用于控制由涡轮分子泵抽真空的真空处理室中的工艺流量和压力的装置和方法。 泵和处理室之间的节流阀被控制以调节压力和流量。 还控制泵下游的后阀，以将节流阀的设置保持在优选的稳定工作范围内。

    Wide range pressure control using turbo pump
    4.
    发明授权
    Wide range pressure control using turbo pump 有权
    使用涡轮泵进行宽范围压力控制

    公开(公告)号：US07438534B2

    公开(公告)日：2008-10-21

    申请号：US11245797

    申请日：2005-10-07

    申请人： Peter John Holland ,  Kate Wilson ,  Dawn Stephenson

    发明人： Peter John Holland ,  Kate Wilson ,  Dawn Stephenson

    IPC分类号： F04B49/00 ,  F04B17/00 ,  F04B35/04

    CPC分类号： C23C16/4412 ,  C23C16/45557 ,  F04D19/042 ,  F04D27/0253

    摘要： The present invention is an apparatus and method for controlling a process flow rate and a pressure in a vacuum process chamber that is evacuated by a turbomolecular pump. A throttle valve between the pump and the process chamber is controlled to regulate the pressure and flow rate. A backing valve downstream of the pump is also controlled to maintain the setting of the throttle valve within a preferred, stable operating range.

    摘要翻译： 本发明是一种用于控制由涡轮分子泵抽真空的真空处理室中的工艺流量和压力的装置和方法。 泵和处理室之间的节流阀被控制以调节压力和流量。 还控制泵下游的后阀，以将节流阀的设置保持在优选的稳定工作范围内。

    Equipment skid
    7.
    发明授权
    Equipment skid 有权
    设备打滑

    公开(公告)号：US06397883B1

    公开(公告)日：2002-06-04

    申请号：US09464184

    申请日：1999-12-16

    申请人： Graeme Huntley ,  Kate Wilson

    发明人： Graeme Huntley ,  Kate Wilson

    IPC分类号： F16K2708

    CPC分类号： H01L21/67017 ,  Y10T137/6851 ,  Y10T137/6881 ,  Y10T137/7062 ,  Y10T137/86083

    摘要： An equipment skid for mounting ancillary equipment to support a semiconductor processing tool. The equipment skid comprises a plurality of equipment sections and a service section. The ancillary equipment is mounted within the equipment sections and the plurality of equipment and service sections are connected to one another in an in-line relationship to define a framework to allow external connections between the ancillary equipment and the semiconductor processing tool to pass through a region overlying the footprint of the service section. The equipment and service sections are preferably covered by an enclosure to contain leakage.

    摘要翻译： 用于安装辅助设备以支持半导体加工工具的设备滑道。 设备滑行包括多个设备部分和服务部分。 辅助设备安装在设备部分内，并且多个设备和维修部分以线内关系彼此连接，以限定框架，以允许辅助设备和半导体加工工具之间的外部连接通过一个区域 覆盖服务部分的足迹。 设备和维修部分优选地被外壳覆盖以容纳泄漏。