Invention Grant
- Patent Title: Charged particle extraction device and method of design there for
- Patent Title (中): 带电粒子提取装置及其设计方法
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Application No.: US12987396Application Date: 2011-01-10
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Publication No.: US08405043B2Publication Date: 2013-03-26
- Inventor: Roderick Boswell , Orson Sutherland
- Applicant: Roderick Boswell , Orson Sutherland
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; John B. Kelly
- Priority: AU2003905709 20031017
- Main IPC: G21K1/08
- IPC: G21K1/08 ; H01J3/14 ; H01J3/26 ; H01J49/42
Abstract:
The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Public/Granted literature
- US20110100798A1 Charged Particle Extraction Device And Method Of Design There for Public/Granted day:2011-05-05
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