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公开(公告)号：US07872242B2
公开(公告)日：2011-01-18
申请号：US10588981
申请日：2004-10-16
Applicant: Roderick Boswell , Orson Sutherland
Inventor： Roderick Boswell , Orson Sutherland
IPC: H01J27/00
CPC classification number: H01J3/00 , H01J27/024 , H01J37/08 , H01J2237/061 , H01J2237/083 , H01J2237/121 , H01J2237/31749
Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Abstract translation: 本发明提供了一种从带电粒子源提取带电粒子束的方法。 在源的输出处提供一组电极。 施加到电极的电位产生在电极的输出处具有基本为零电场的低发射率增长光束。
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2.发明授权Magnetically enhanced, inductively coupled plasma source for a focused ion beam system 有权用于聚焦离子束系统的磁感应耦合等离子体源公开(公告)号：US08829468B2
公开(公告)日：2014-09-09
申请号：US13437518
申请日：2012-04-02
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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3.发明申请MAGNETICALLY ENHANCED, INDUCTIVELY COUPLED PLASMA SOURCE FOR A FOCUSED ION BEAM SYSTEM 有权用于聚焦离子束系统的磁感应加强电感耦合等离子体源公开(公告)号：US20120319000A1
公开(公告)日：2012-12-20
申请号：US13437518
申请日：2012-04-02
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
IPC: G21K5/04
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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4.发明申请Magnetically Enhanced, Inductively Coupled Plasma Source for a Focused Ion Beam System 有权用于聚焦离子束系统的磁强电感耦合等离子体源公开(公告)号：US20100294648A1
公开(公告)日：2010-11-25
申请号：US12704123
申请日：2010-02-11
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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5.发明申请Magnetically enhanced, inductively coupled plasma source for a focused ion beam system 有权用于聚焦离子束系统的磁感应耦合等离子体源公开(公告)号：US20050183667A1
公开(公告)日：2005-08-25
申请号：US10988745
申请日：2004-11-13
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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Patent Agency Ranking
公开(公告)号：US5900063A
公开(公告)日：1999-05-04
申请号：US682633
申请日：1996-09-05
Applicant: Roderick Boswell , Antoine Durandet , David MacKenzie
Inventor： Roderick Boswell , Antoine Durandet , David MacKenzie
CPC classification number: H01J37/32422 , C23C14/30 , C23C14/32 , H01J37/3266
Abstract: A method and apparatus for forming a coating on a substrate. The system (1) comprises an electron-beam evaporator (5) to produce an evaporant (6) from a source material, a plasma generation chamber (3), within which a magnetoplasma is generated, and a magnetic field supply means (10) to apply a magnetic field (11) to the apparatus (1), to transport the magnetoplasma (60) to the substrate (12).
Abstract translation: PCT No.PCT / AU95 / 00047 Sec。 371日期：1996年9月5日 102（e）日期1996年9月5日PCT提交1995年2月2日PCT公布。 公开号WO95 / 21276 日期1995年8月10日在基板上形成涂层的方法和装置。 系统（1）包括从源材料产生蒸发器（6）的电子束蒸发器（5），产生磁致发电的等离子体产生室（3）和磁场供应装置（10） 将磁场（11）施加到装置（1），以将磁致（60）传输到基板（12）。
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公开(公告)号：US08405043B2
公开(公告)日：2013-03-26
申请号：US12987396
申请日：2011-01-10
Applicant: Roderick Boswell , Orson Sutherland
Inventor： Roderick Boswell , Orson Sutherland
CPC classification number: H01J3/00 , H01J27/024 , H01J37/08 , H01J2237/061 , H01J2237/083 , H01J2237/121 , H01J2237/31749
Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Abstract translation: 本发明提供了一种从带电粒子源提取带电粒子束的方法。 在源的输出处提供一组电极。 施加到电极的电位产生在电极的输出处具有基本为零电场的低发射率增长光束。
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8.发明授权Magnetically enhanced, inductively coupled plasma source for a focused ion beam system 有权用于聚焦离子束系统的磁感应耦合等离子体源公开(公告)号：US08168957B2
公开(公告)日：2012-05-01
申请号：US12704123
申请日：2010-02-11
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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公开(公告)号：US20110100798A1
公开(公告)日：2011-05-05
申请号：US12987396
申请日：2011-01-10
Applicant: Roderick Boswell , Orson Sutherland
Inventor： Roderick Boswell , Orson Sutherland
CPC classification number: H01J3/00 , H01J27/024 , H01J37/08 , H01J2237/061 , H01J2237/083 , H01J2237/121 , H01J2237/31749
Abstract: The present invention provides a method for extracting a charged particle beam from a charged particle source. A set of electrodes is provided at the output of the source. The potentials applied to the electrodes produce a low-emittance growth beam with substantially zero electric field at the output of the electrodes.
Abstract translation: 本发明提供了一种从带电粒子源提取带电粒子束的方法。 在源的输出处提供一组电极。 施加到电极的电位产生在电极的输出处具有基本为零电场的低发射率增长光束。
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10.发明授权Magnetically enhanced, inductively coupled plasma source for a focused ion beam system 有权用于聚焦离子束系统的磁感应耦合等离子体源公开(公告)号：US07670455B2
公开(公告)日：2010-03-02
申请号：US11825136
申请日：2007-07-02
Applicant: John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
Inventor： John Keller , Noel Smith , Roderick Boswell , Lawrence Scipioni , Christine Charles , Orson Sutherland
CPC classification number: H01J37/32183 , H01J27/16 , H01J37/08 , H01J37/241 , H01J37/321 , H01J37/3211 , H01J37/32669 , H01J2237/0815
Abstract: The present invention provides an inductively coupled, magnetically enhanced ion beam source, suitable to be used in conjunction with probe-forming optics to produce an ion beam without kinetic energy oscillations induced by the source.
Abstract translation: 本发明提供了一种电感耦合磁增强型离子束源，适用于与探针形成光学器件结合使用以产生离子束而不产生由该源引起的动能振荡。
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