Invention Grant
US08405414B2 Wafer testing systems and associated methods of use and manufacture
有权
晶圆测试系统及相关使用和制造方法
- Patent Title: Wafer testing systems and associated methods of use and manufacture
- Patent Title (中): 晶圆测试系统及相关使用和制造方法
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Application No.: US13247981Application Date: 2011-09-28
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Publication No.: US08405414B2Publication Date: 2013-03-26
- Inventor: Aaron Durbin , David Keith , Morgan T. Johnson
- Applicant: Aaron Durbin , David Keith , Morgan T. Johnson
- Applicant Address: US OR Beaverton
- Assignee: Advanced Inquiry Systems, Inc.
- Current Assignee: Advanced Inquiry Systems, Inc.
- Current Assignee Address: US OR Beaverton
- Agency: Perkins Coie LLP
- Main IPC: G01R31/20
- IPC: G01R31/20

Abstract:
A wafer testing system and associated methods of use and manufacture are disclosed herein. In one embodiment, the wafer testing system includes an assembly for releaseably attaching a wafer to a wafer translator and the wafer translator to an interposer by means of separately operable vacuums, or pressure differentials. The assembly includes a wafer translator support ring coupled to the wafer translator, wherein a first flexible material extends from the wafer translator support ring so as to enclose the space between the wafer translator and the interposer so that the space may be evacuated by a first vacuum through one or more first evacuation paths. The assembly can further include a wafer support ring coupled to the wafer and the chuck, wherein a second flexible material extends from wafer support ring so as to enclose the space between the wafer and the wafer translator so that the space may be evacuated by a second vacuum through one or more second evacuation pathways.
Public/Granted literature
- US20120074976A1 WAFER TESTING SYSTEMS AND ASSOCIATED METHODS OF USE AND MANUFACTURE Public/Granted day:2012-03-29
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