发明授权
US08461284B2 Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers
有权
硅聚合物，聚合硅化合物的方法以及从这种硅聚合物形成薄膜的方法
- 专利标题： Silicon polymers, methods of polymerizing silicon compounds, and methods of forming thin films from such silicon polymers
- 专利标题（中）： 硅聚合物，聚合硅化合物的方法以及从这种硅聚合物形成薄膜的方法
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申请号： US13299318申请日： 2011-11-17
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公开(公告)号： US08461284B2公开(公告)日： 2013-06-11
- 发明人: Dmitry Karshtedt , Joerg Rockenberger , Fabio Zürcher , Brent Ridley , Erik Scher
- 申请人： Dmitry Karshtedt , Joerg Rockenberger , Fabio Zürcher , Brent Ridley , Erik Scher
- 申请人地址： US CA San Jose
- 专利权人： Kovio, Inc.
- 当前专利权人： Kovio, Inc.
- 当前专利权人地址： US CA San Jose
- 代理商 Andrew D. Fortney
- 主分类号： C08G77/00
- IPC分类号： C08G77/00 ; C07F7/02 ; C07F7/30 ; H01L21/20
摘要：
Compositions and methods for controlled polymerization and/or oligomerization of hydrosilanes compounds including those of the general formulae SinH2n and SinH2n+2 as well as alkyl- and arylsilanes, to produce soluble silicon polymers as a precursor to silicon films having low carbon content.