Metal inks, methods of making the same, and methods for printing and/or forming metal films
    5.
    发明授权
    Metal inks, methods of making the same, and methods for printing and/or forming metal films 有权
    金属油墨,其制造方法以及印刷和/或形成金属膜的方法

    公开(公告)号:US08066805B2

    公开(公告)日:2011-11-29

    申请号:US12131002

    申请日:2008-05-30

    IPC分类号: C23C16/00 C09D1/00 B05D3/00

    摘要: Printable metal formulations, methods of making the formulations, and methods of coating or printing thin films from metal ink precursors are disclosed. The metal formulation generally includes one or more Group 4, 5, 6, 7, 8, 9, 10, 11, or 12 metal salts or metal complexes, one or more solvents adapted to facilitate coating and/or printing of the formulation, and one or more optional additives that form (only) gaseous or volatile byproducts upon reduction of the metal salt or metal complex to an elemental metal and/or alloy thereof. The formulation may be made by combining the metal salt(s) or metal complex(es) and the solvent(s), and dissolving the metal salt(s) or metal complex(es) in the solvent(s) to form the formulation. Thin films may be made by coating or printing the metal formulation on a substrate; removing the solvents to form a metal-containing precursor film; and reducing the metal-containing precursor film.

    摘要翻译: 公开了可印刷金属配方,制备方法,以及从金属油墨前体涂布或印刷薄膜的方法。 金属配方通常包括一种或多种组合物4,5,6,7,8,9,10,11或12金属盐或金属配合物,一种或多种适于促进制剂涂布和/或印刷的溶剂,以及 一种或多种任选的添加剂,其在将金属盐或金属络合物还原成元素金属和/或其合金时形成(仅)气态或挥发性副产物。 制剂可以通过将金属盐或金属络合物和溶剂组合,并将金属盐或金属络合物溶解在溶剂中来形成制剂, 。 薄膜可以通过在基底上涂覆或印刷金属制剂来制备; 除去溶剂以形成含金属的前体膜; 并还原含金属的前体膜。

    Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions
    8.
    发明授权
    Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions 有权
    形成掺杂半导体薄膜,掺杂半导体薄膜结构,掺杂硅烷组合物的方法和制备这种组合物的方法

    公开(公告)号:US07314513B1

    公开(公告)日:2008-01-01

    申请号:US10949013

    申请日:2004-09-24

    IPC分类号: C09D183/16

    摘要: Methods for forming doped silane and/or semiconductor thin films, doped liquid phase silane compositions useful in such methods, and doped semiconductor thin films and structures. The composition is generally liquid at ambient temperatures and includes a Group IVA atom source and a dopant source. By irradiating a doped liquid silane during at least part of its deposition, a thin, substantially uniform doped oligomerized/polymerized silane film may be formed on a substrate. Such irradiation is believed to convert the doped silane film into a relatively high-molecular weight species with relatively high viscosity and relatively low volatility, typically by cross-linking, isomerization, oligomerization and/or polymerization. A film formed by the irradiation of doped liquid silanes can later be converted (generally by heating and annealing/recrystallization) into a doped, hydrogenated, amorphous silicon film or a doped, at least partially polycrystalline silicon film suitable for electronic devices. Thus, the present invention enables use of high throughput, low cost equipment and techniques for making doped semiconductor films of commercial quality and quantity from doped “liquid silicon.”

    摘要翻译: 用于形成掺杂的硅烷和/或半导体薄膜的方法,用于这种方法的掺杂的液相硅烷组合物,以及掺杂的半导体薄膜和结构。 组合物在环境温度下通常是液体,并且包括IVA族原子源和掺杂剂源。 通过在其沉积的至少一部分期间照射掺杂的液体硅烷,可以在衬底上形成薄的,基本上均匀的掺杂的低聚/聚合的硅烷膜。 据信这种照射将掺杂的硅烷膜转化成相对高分子量的物质,具有相对较高的粘度和较低挥发性,通常通过交联,异构化,低聚和/或聚合。 通过掺杂的液体硅烷的照射形成的膜可以随后通过加热和退火/重结晶转化成掺杂的,氢化的非晶硅膜或适用于电子器件的掺杂的至少部分多晶的硅膜。 因此,本发明能够使用高通量,低成本的设备和技术来制造掺杂的“液态硅”具有商业质量和数量的掺杂半导体膜。

    Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions
    10.
    发明授权
    Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions 有权
    形成掺杂半导体薄膜,掺杂半导体薄膜结构,掺杂硅烷组合物的方法和制备这种组合物的方法

    公开(公告)号:US08372194B1

    公开(公告)日:2013-02-12

    申请号:US12020481

    申请日:2008-01-25

    IPC分类号: C09D183/16

    摘要: Methods for forming doped silane and/or semiconductor thin films, doped liquid phase silane compositions useful in such methods, and doped semiconductor thin films and structures. The composition is generally liquid at ambient temperatures and includes a Group IVA atom source and a dopant source. By irradiating a doped liquid silane during at least part of its deposition, a thin, substantially uniform doped oligomerized/polymerized silane film may be formed on a substrate. Such irradiation is believed to convert the doped silane film into a relatively high-molecular weight species with relatively high viscosity and relatively low volatility, typically by cross-linking, isomerization, oligomerization and/or polymerization. A film formed by the irradiation of doped liquid silanes can later be converted (generally by heating and annealing/recrystallization) into a doped, hydrogenated, amorphous silicon film or a doped, at least partially polycrystalline silicon film suitable for electronic devices. Thus, the present invention enables use of high throughput, low cost equipment and techniques for making doped semiconductor films of commercial quality and quantity from doped “liquid silicon.”

    摘要翻译: 用于形成掺杂的硅烷和/或半导体薄膜的方法,用于这种方法的掺杂的液相硅烷组合物,以及掺杂的半导体薄膜和结构。 组合物在环境温度下通常是液体,并且包括IVA族原子源和掺杂剂源。 通过在其沉积的至少一部分期间照射掺杂的液体硅烷,可以在衬底上形成薄的,基本上均匀的掺杂的低聚/聚合的硅烷膜。 据信这种照射将掺杂的硅烷膜转化成相对高分子量的物质,具有相对较高的粘度和较低挥发性,通常通过交联,异构化,低聚和/或聚合。 通过掺杂的液体硅烷的照射形成的膜可以随后通过加热和退火/重结晶转化成掺杂的,氢化的非晶硅膜或适用于电子器件的掺杂的至少部分多晶的硅膜。 因此,本发明能够使用高通量,低成本的设备和技术来制造掺杂的液态硅具有商业质量和数量的掺杂半导体膜。