发明授权
- 专利标题： Imprint method, computer storage medium and imprint apparatus
- 专利标题（中）： 印刷方法，计算机存储介质和压印装置
-
申请号： US13393250申请日： 2010-08-25
-
公开(公告)号： US08468943B2公开(公告)日： 2013-06-25
- 发明人: Koukichi Hiroshiro , Takanori Nishi , Shoichi Terada , Takahiro Kitano
- 申请人： Koukichi Hiroshiro , Takanori Nishi , Shoichi Terada , Takahiro Kitano
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Posz Law Group, PLLC
- 优先权： JP2009-202243 20090902
- 国际申请： PCT/JP2010/064376 WO 20100825
- 国际公布： WO2011/027698 WO 20110310
- 主分类号： H01L21/27
- IPC分类号： H01L21/27 ; B29C59/02 ; B41F1/00 ; B41F33/00 ; B05D1/32 ; B01D5/00 ; B01D3/02 ; G01B17/00
摘要：
The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.
公开/授权文献
信息查询
