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1.发明申请TEMPLATE TREATMENT METHOD, PROGRAM, COMPUTER STORAGE MEDIUM, TEMPLATE TREATMENT APPARATUS AND IMPRINT SYSTEM 失效模板处理方法，程序，计算机存储介质，模板处理装置和印刷系统公开(公告)号：US20110117291A1
公开(公告)日：2011-05-19
申请号：US12943204
申请日：2010-11-10
CPC分类号： H01L21/67173 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/67028 , H01L21/67034 , H01L21/6715 , H01L21/67757
摘要： In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.
摘要翻译： 在模板处理面上形成脱模剂的膜的模板处理中，首先对模板的处理面进行清洗。 此后，在涂布单元中，将脱模剂施加到模板的处理表面。 然后将模板上的脱模剂干燥。 然后，将酒精施加到模板上的脱模剂上，使脱模剂粘附在模板的处理表面上，并除去脱模剂的未反应部分。 此后，将模板上的醇干燥并除去。 以这种方式，在模板的处理表面上以预定的膜厚度形成剥离剂的膜。
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公开(公告)号：US08468943B2
公开(公告)日：2013-06-25
申请号：US13393250
申请日：2010-08-25
CPC分类号： B29C37/0053 , B29C33/20 , B29C43/021 , B29C59/022 , B29C2043/025 , B29C2043/3488 , B29K2105/0002 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.
摘要翻译： 本发明提供了一种在模板和基板之间施加涂布液并将转印图案转印到涂布液上的方法。 模板相对于基板倾斜地布置，使得模板的第一端部与基板之间的第一距离是引起施加液体的毛细作用的距离，并且第二距离在第二 与第一端部和基板相对的模板的端部是不会引起施加液的毛细作用的距离。 此后，将应用液从第一端部的外侧供给到第一端部。 此后，第二端部和基板相对移动，使得第二距离变得等于第一距离。
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公开(公告)号：US20120152136A1
公开(公告)日：2012-06-21
申请号：US13393250
申请日：2010-08-25
IPC分类号： B41F1/04
CPC分类号： B29C37/0053 , B29C33/20 , B29C43/021 , B29C59/022 , B29C2043/025 , B29C2043/3488 , B29K2105/0002 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： The present invention provides a method for applying an application liquid between a template and a substrate, and transferring the transfer pattern onto the application liquid. The template is inclinedly arranged with respect to the substrate in a manner that a first distance between a first end portion of the template and the substrate is a distance that causes a capillary action of the application liquid to occur, and a second distance between a second end portion of the template that opposes the first end portion and the substrate is a distance that does not cause the capillary action of the application liquid to occur. Thereafter, the application liquid is supplied from an outer side of the first end portion to the first end portion. Thereafter, the second end portion and the substrate are relatively moved so that the second distance becomes equal to the first distance.
摘要翻译： 本发明提供了一种在模板和基板之间施加涂布液并将转印图案转印到涂布液上的方法。 模板相对于基板倾斜地布置，使得模板的第一端部与基板之间的第一距离是引起施加液体的毛细作用的距离，并且第二距离在第二 与第一端部和基板相对的模板的端部是不会引起施加液的毛细作用的距离。 此后，将应用液从第一端部的外侧供给到第一端部。 此后，第二端部和基板相对移动，使得第二距离变得等于第一距离。
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4.发明授权Template treatment method, program, computer storage medium, template treatment apparatus and imprint system 失效模板处理方法，程序，计算机存储介质，模板处理装置和压印系统公开(公告)号：US08522712B2
公开(公告)日：2013-09-03
申请号：US12943204
申请日：2010-11-10
IPC分类号： B05C5/02
CPC分类号： H01L21/67173 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/67028 , H01L21/67034 , H01L21/6715 , H01L21/67757
摘要： In a template treatment of forming a film of a release agent on a treatment surface of a template, the treatment surface of the template is first cleaned. Thereafter, in a coating unit, the release agent is applied to the treatment surface of the template. The release agent on the template is then dried. Then, alcohol is applied to the release agent on the template to make the release agent adhere to the treatment surface of the template and to remove an unreacted portion of the release agent. Thereafter, the alcohol on the template is dried and removed. In this manner, a film of the release agent is formed in a predetermined film thickness on the treatment surface of the template.
摘要翻译： 在模板处理面上形成脱模剂的膜的模板处理中，首先对模板的处理面进行清洗。 此后，在涂布单元中，将脱模剂施加到模板的处理表面。 然后将模板上的脱模剂干燥。 然后，将酒精施加到模板上的脱模剂上，使脱模剂粘附在模板的处理表面上，并除去脱模剂的未反应部分。 此后，将模板上的醇干燥并除去。 以这种方式，在模板的处理表面上以预定的膜厚度形成剥离剂的膜。
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公开(公告)号：US08840728B2
公开(公告)日：2014-09-23
申请号：US13378163
申请日：2010-06-21
申请人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
发明人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
IPC分类号： C23C16/00 , B05C21/00 , B05C13/02 , B05C13/00 , H01L21/687 , H01L21/56 , H01L21/673 , H01L21/67 , G03F7/00 , B82Y10/00 , B82Y40/00 , B29C33/58 , B28B7/38 , B65B33/00 , B05D3/02
CPC分类号： B05C13/00 , B29C33/58 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/566 , H01L21/67057 , H01L21/6715 , H01L21/67178 , H01L21/6719 , H01L21/67207 , H01L21/67333 , H01L21/68707 , H01L2924/0002 , Y10S414/141 , H01L2924/00
摘要： The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.
摘要翻译： 本发明是一种模板处理装置，在模板上形成具有形成在其前表面上的转印图案的模板上的脱模剂的膜，该模板处理装置包括：处理站，在前表面形成脱模剂膜 模板; 以及能够保持多个模板并将模板搬入/离开处理站的模板搬入/出站，其中处理站包括：清洁模板的前表面的清洁单元; 涂布单元，将脱模剂施加到模板的清洁前表面上; 加热单元烘烤所施加的脱模剂; 以及将模板携带到清洁单元，涂布单元和加热单元的携带单元。
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公开(公告)号：US20120097336A1
公开(公告)日：2012-04-26
申请号：US13378163
申请日：2010-06-21
申请人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
发明人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
CPC分类号： B05C13/00 , B29C33/58 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/566 , H01L21/67057 , H01L21/6715 , H01L21/67178 , H01L21/6719 , H01L21/67207 , H01L21/67333 , H01L21/68707 , H01L2924/0002 , Y10S414/141 , H01L2924/00
摘要： The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment apparatus including: a treatment station forming a film of a release agent on the front surface of the template; and a template carry-in/out station capable of keeping a plurality of the templates, and carrying the template into/out of the treatment station, wherein the treatment station includes: a cleaning unit cleaning the front surface of the template; a coating unit applying a release agent to the cleaned front surface of the template; a heating unit baking the applied release agent; and a carry unit carrying the template to the cleaning unit, the coating unit, and the heating unit.
摘要翻译： 本发明是一种模板处理装置，在模板上形成具有形成在其前表面上的转印图案的模板上的脱模剂的膜，该模板处理装置包括：处理站，在前表面形成脱模剂膜 模板; 以及能够保持多个模板并将模板搬入/离开处理站的模板搬入/出站，其中处理站包括：清洁模板的前表面的清洁单元; 涂布单元，将脱模剂施加到模板的清洁前表面上; 加热单元烘烤施加的脱模剂; 以及将模板携带到清洁单元，涂覆单元和加热单元的携带单元。
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7.发明申请IMPRINT SYSTEM, IMPRINT METHOD, AND NON-TRANSITORY COMPUTER STORAGE MEDIUM 审中-公开印刷系统，印刷方法和非电子计算机存储介质公开(公告)号：US20120086142A1
公开(公告)日：2012-04-12
申请号：US13378079
申请日：2010-06-21
申请人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
发明人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
CPC分类号： H01L21/67173 , B29C33/58 , B82Y10/00 , B82Y40/00 , G03F7/0002 , H01L21/67207 , H01L21/67745 , H01L21/6776
摘要： The present invention is a system including: an imprint unit transferring a transfer pattern to a coating film on a substrate using a template to form a predetermined pattern in the coating film; a treatment station connected to the imprint unit and performing a predetermined treatment on the template; a template carry-in/out station connected to the treatment station, capable of keeping templates, and carrying the template in/out from/to the treatment station; a carry line provided through the imprint unit and carrying the template between the imprint unit and the treatment station; and a substrate carry-in/out station connected to the imprint unit, capable of keeping substrates, and carrying the substrate in/out from/to the imprint unit.
摘要翻译： 本发明是一种系统，包括：压印单元，使用模板将转印图案转印到基板上的涂膜上，以在涂膜中形成预定图案; 连接到压印单元并对模板执行预定处理的处理站; 连接到治疗台的模板进/出站，能够保存模板，并将模板从/移出到处理站; 通过压印单元提供的携带线，并且在压印单元和处理站之间承载模板; 以及连接到压印单元的基板输入/输出站，能够保持基板，并将基板输入/输出到压印单元。
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8.发明授权公开(公告)号：US08888920B2
公开(公告)日：2014-11-18
申请号：US13376876
申请日：2010-06-11
申请人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
发明人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
IPC分类号： C23C16/00 , B05C5/00 , B05C9/08 , B05C1/06 , B05B13/02 , H01L21/677 , B28B7/38 , B29C33/58 , B08B3/02 , G03F7/00 , B82Y10/00 , H01L21/67 , B82Y40/00 , B05C13/00 , B05D3/12
CPC分类号： G03F7/0002 , B05C13/00 , B08B3/024 , B29C33/58 , B82Y10/00 , B82Y40/00 , H01L21/67225 , Y10S414/141
摘要： The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, the imprint system including: a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side; and a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side at a predetermined timing.
摘要翻译： 本发明是一种压印系统，包括：压印单元，其使用具有形成在其前表面上的转印图案的模板将转印图案转印到形成在基板上的涂膜上，以在涂膜中形成预定图案，所述压印系统包括 连接到压印单元的基板输入/输出站，能够保持多个基板，并将基板搬入/移出压印单元侧; 以及连接到压印单元的模板进/出站，能够保持多个模板，并且在预定的定时将模板传入/离开压印单元侧。
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9.发明申请公开(公告)号：US20120073461A1
公开(公告)日：2012-03-29
申请号：US13376876
申请日：2010-06-11
申请人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
发明人： Shoichi Terada , Yoshio Kimura , Takahiro Kitano
CPC分类号： G03F7/0002 , B05C13/00 , B08B3/024 , B29C33/58 , B82Y10/00 , B82Y40/00 , H01L21/67225 , Y10S414/141
摘要： The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on a front surface thereof to form a predetermined pattern in the coating film, the imprint system including: a substrate carry-in/out station connected to the imprint unit, capable of keeping a plurality of the substrates, and carrying the substrate into/out of the imprint unit side; and a template carry-in/out station connected to the imprint unit, capable of keeping a plurality of the templates, and carrying the template into/out of the imprint unit side at a predetermined timing.
摘要翻译： 本发明是一种压印系统，包括：压印单元，其使用具有形成在其前表面上的转印图案的模板将转印图案转印到形成在基板上的涂膜上，以在涂膜中形成预定图案，所述压印系统包括 连接到压印单元的基板输入/输出站，能够保持多个基板，并将基板搬入/移出压印单元侧; 以及连接到压印单元的模板进/出站，能够保持多个模板，并且在预定的定时将模板传入/离开压印单元侧。
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公开(公告)号：US08410697B2
公开(公告)日：2013-04-02
申请号：US11610157
申请日：2006-12-13
申请人： Kazuhiro Goto , Akihiko Sugitani , Shoichi Terada , Takahiro Toma
发明人： Kazuhiro Goto , Akihiko Sugitani , Shoichi Terada , Takahiro Toma
CPC分类号： H01J61/86 , H01J61/0732 , H01J61/20 , H04N9/3114 , H05B41/2928 , Y02B20/208
摘要： A light source device which can also advantageously control the growth of the projection using the DMD type is achieved in a light source device which has an ultrahigh pressure discharge lamp) in which the silica glass discharge vessel is filled with greater than or equal to 0.15 mg/mm3 mercury and bromine; a feed device; an oval reflector; and a color wheel by the electrode on the side of the opening of the oval reflector of the discharge lamp having an increased diameter, and the relation 0.06
摘要翻译： 在具有超高压放电灯的光源装置中实现也可以有利地控制使用DMD型的投影的生长的光源装置，其中石英玻璃放电容器填充有大于或等于0.15mg / mm3汞和溴; 饲料装置; 椭圆形反射器 并且通过电极在放电灯的椭圆形反射器的开口侧具有增加的直径的色轮，以及具有增加的直径的尖端区域的体积W（mm3）之间的关系0.06
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