发明授权
US08481388B2 Non-volatile memory device having a nitride-oxide dielectric layer
有权
具有氮化物 - 氧化物电介质层的非易失性存储器件
- 专利标题: Non-volatile memory device having a nitride-oxide dielectric layer
- 专利标题(中): 具有氮化物 - 氧化物电介质层的非易失性存储器件
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申请号: US12818057申请日: 2010-06-17
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公开(公告)号: US08481388B2公开(公告)日: 2013-07-09
- 发明人: Chao-I Wu , Tzu-Hsuan Hsu , Hang-Ting Lue , Erh-Kun Lai
- 申请人: Chao-I Wu , Tzu-Hsuan Hsu , Hang-Ting Lue , Erh-Kun Lai
- 申请人地址: TW Hsinchu
- 专利权人: Macronix International Co., Ltd.
- 当前专利权人: Macronix International Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Haynes Beffel & Wolfeld LLP
- 代理商 Kenta Suzue
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A non-volatile memory cell may include a semiconductor substrate; a source region in a portion of the substrate; a drain region within a portion of the substrate; a well region within a portion of the substrate. The memory cell may further include a first carrier tunneling layer over the substrate; a charge storage layer over the first carrier tunneling layer; a second carrier tunneling layer over the charge storage layer; and a conductive control gate over the second carrier tunneling layer. Specifically, the drain region is spaced apart from the source region, and the well region may surround at least a portion of the source and drain regions. In one example, the second carrier tunneling layer provides hole tunneling during an erasing operation and may include at least one dielectric layer.
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