- 专利标题: Process of forming a grid electrode on the front-side of a silicon wafer
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申请号: US12783761申请日: 2010-05-20
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公开(公告)号: US08486826B2公开(公告)日: 2013-07-16
- 发明人: Russell David Anderson , Kenneth Warren Hang , Shih-Ming Kao , Giovanna Laudisio , Cheng-Nan Lin , Chun-Kwei Wu
- 申请人: Russell David Anderson , Kenneth Warren Hang , Shih-Ming Kao , Giovanna Laudisio , Cheng-Nan Lin , Chun-Kwei Wu
- 申请人地址: US DE Wilmington
- 专利权人: E I Du Pont De Nemours and Company
- 当前专利权人: E I Du Pont De Nemours and Company
- 当前专利权人地址: US DE Wilmington
- 主分类号: H01L31/0392
- IPC分类号: H01L31/0392 ; H01L21/283 ; H01L29/40
摘要:
A process of forming a front-grid electrode on a silicon wafer having an ARC layer, comprising the steps: (1) printing and drying a metal paste A comprising an inorganic content comprising 0.5 to 8 wt.-% of glass frit and having fire-through capability, wherein the metal paste A is printed on the ARC layer to form a bottom set of thin parallel finger lines, (2) printing and drying a metal paste B comprising an inorganic content comprising 0.2 to 3 wt.-% of glass frit over the bottom set of finger lines, wherein the metal paste B is printed in a grid pattern which comprises (i) thin parallel finger lines forming a top set of finger lines superimposing the bottom set of finger lines and (ii) busbars intersecting the finger lines at right angle, and (3) firing the double-printed silicon wafer, wherein the inorganic content of metal paste B contains less glass frit plus optionally present other inorganic additives than the inorganic content of metal paste A.
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