发明授权
- 专利标题: Spacer structure for transistor device and method of manufacturing same
- 专利标题(中): 晶体管器件的间隔结构及其制造方法
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申请号: US12874362申请日: 2010-09-02
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公开(公告)号: US08501572B2公开(公告)日: 2013-08-06
- 发明人: Chun-Tsung Kuo , Shih-Chang Liu , Chia-Shiung Tsai
- 申请人: Chun-Tsung Kuo , Shih-Chang Liu , Chia-Shiung Tsai
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes and Boone, LLP
- 主分类号: H01L21/331
- IPC分类号: H01L21/331
摘要:
The present disclosure provides a bipolar junction transistor (BJT) device and methods for manufacturing the BJT device. In an embodiment, the BJT device includes: a semiconductor substrate having a collector region, and a material layer disposed over the semiconductor layer. The material layer has a trench therein that exposes a portion of the collector region. A base structure, spacers, and emitter structure are disposed within the trench of the material layer. Each spacer has a top width and a bottom width, the top width being substantially equal to the bottom width.
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