发明授权
- 专利标题: Apparatus for delivering a process gas
- 专利标题(中): 用于输送处理气体的装置
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申请号: US13436705申请日: 2012-03-30
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公开(公告)号: US08521461B2公开(公告)日: 2013-08-27
- 发明人: Iqbal A. Shareef , James V. Tietz , Vernon Wong , Richard J. Meinecke
- 申请人: Iqbal A. Shareef , James V. Tietz , Vernon Wong , Richard J. Meinecke
- 申请人地址: US CA Fremont
- 专利权人: Lam Research Corporation
- 当前专利权人: Lam Research Corporation
- 当前专利权人地址: US CA Fremont
- 代理机构: Klintworth & Rozenblat IP LLC
- 主分类号: G01F1/12
- IPC分类号: G01F1/12
摘要:
A processing system for delivering a process gas to a reaction chamber using a recipe having a recipe flow rate is provided. The processing system includes a gas flow delivery system configured for delivering the process gas, wherein said gas flow delivery system controlled by a mass flow controller (MFC) to an orifice. The predicted flow rate is previously computed by pressurizing a gas. The predicted flow rate further being previously computed measuring a set of upstream pressure values of the gas via at least one sensor. The processing system also includes a programmed computing device configured for applying a calibration factor of a set of calibration factors to determine the predicted flow rate, the calibration factor being a ratio of an average of the set of upstream pressure values to an average of a set of golden upstream pressure values.
公开/授权文献
- US20120247581A1 APPARATUS FOR DELIVERING A PROCESS GAS 公开/授权日:2012-10-04
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