Invention Grant
US08524048B2 Processes for recovering silane from heavy-ends separation operations 有权
从重尾分离操作回收硅烷的方法

Processes for recovering silane from heavy-ends separation operations
Abstract:
Processes and systems for purifying silane-containing streams are disclosed with relatively less silane being lost in impurity streams by use of distillation and/or condensation operations.
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