Invention Grant
- Patent Title: Method and apparatus for MEMS oscillator
- Patent Title (中): MEMS振荡器的方法和装置
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Application No.: US13275617Application Date: 2011-10-18
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Publication No.: US08530258B2Publication Date: 2013-09-10
- Inventor: Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
- Applicant: Xiao Yang , Dongmin Chen , Ye Wang , Justin Payne , Yuxiang Wang , Wook Ji
- Applicant Address: US CA Sunnyvale
- Assignee: Miradia Inc.
- Current Assignee: Miradia Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: Kilpatrick Townsend & Stockton, LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H03B5/30
Abstract:
A resonator includes a CMOS substrate having a first electrode and a second electrode. The CMOS substrate is configured to provide one or more control signals to the first electrode. The resonator also includes a resonator structure including a silicon material layer. The resonator structure is coupled to the CMOS substrate and configured to resonate in response to the one or more control signals.
Public/Granted literature
- US20120034724A1 METHOD AND APPARATUS FOR MEMS OSCILLATOR Public/Granted day:2012-02-09
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