Invention Grant
- Patent Title: Generating a pumping force in a silicon melt by applying a time-varying magnetic field
- Patent Title (中): 通过施加时变磁场在硅熔体中产生泵送力
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Application No.: US12537066Application Date: 2009-08-06
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Publication No.: US08551247B2Publication Date: 2013-10-08
- Inventor: Hariprasad Sreedharamurthy , Milind Kulkarni , Harold W. Korb
- Applicant: Hariprasad Sreedharamurthy , Milind Kulkarni , Harold W. Korb
- Applicant Address: US MO St. Peters
- Assignee: MEMC Electronic Materials, Inc.
- Current Assignee: MEMC Electronic Materials, Inc.
- Current Assignee Address: US MO St. Peters
- Agency: Armstrong Teasdale LLP
- Main IPC: C30B30/04
- IPC: C30B30/04

Abstract:
Controlling crystal growth in a crystal growing system is described. The crystal growing system includes a heated crucible including a semiconductor melt from which a monocrystalline ingot is grown according to a Czochralski and the ingot is grown on a seed crystal pulled from the melt. The method includes applying a cusped magnetic field to the melt by supplying an upper coil with a first direct current (IUDC) and supplying a lower coil with a second direct current (ILDC). The method also includes supplying the upper coil with a first alternating current (IUAC) and supplying the lower coil with a second alternating current (ILAC) to generate a time-varying magnetic field, wherein the time-varying magnetic field generates a pumping force in the semiconductor melt.
Public/Granted literature
- US20100031870A1 GENERATING A PUMPING FORCE IN A SILICON MELT BY APPLYING A TIME-VARYING MAGNETIC FIELD Public/Granted day:2010-02-11
Information query
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