Invention Grant
US08551247B2 Generating a pumping force in a silicon melt by applying a time-varying magnetic field 有权
通过施加时变磁场在硅熔体中产生泵送力

Generating a pumping force in a silicon melt by applying a time-varying magnetic field
Abstract:
Controlling crystal growth in a crystal growing system is described. The crystal growing system includes a heated crucible including a semiconductor melt from which a monocrystalline ingot is grown according to a Czochralski and the ingot is grown on a seed crystal pulled from the melt. The method includes applying a cusped magnetic field to the melt by supplying an upper coil with a first direct current (IUDC) and supplying a lower coil with a second direct current (ILDC). The method also includes supplying the upper coil with a first alternating current (IUAC) and supplying the lower coil with a second alternating current (ILAC) to generate a time-varying magnetic field, wherein the time-varying magnetic field generates a pumping force in the semiconductor melt.
Information query
Patent Agency Ranking
0/0