It is possible to correctly determine whether a change in the pressure or flow rate is caused by normal opening and closing operations of a check valve and to monitor in real time whether an operation of a check valve is normal or abnormal in a liquid supply device. Light is introduced in the check valve and a change in the quantity of light transmitted through or reflected by the check valve, caused by the opening and closing of the valve is detected, so that the opening and closing operations of the check valve can be directly detected. The check valve is arranged in a pipe in the liquid supply device, and a change in the pressure in the pipe is monitored on the basis of a signal from a pressure sensor and a signal which represents the opening and closing of the check valve.