Invention Grant
US08563361B2 Packaging method of molded wafer level chip scale package (WLCSP)
有权
模制晶圆级芯片级封装(WLCSP)的封装方法
- Patent Title: Packaging method of molded wafer level chip scale package (WLCSP)
- Patent Title (中): 模制晶圆级芯片级封装(WLCSP)的封装方法
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Application No.: US13547358Application Date: 2012-07-12
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Publication No.: US08563361B2Publication Date: 2013-10-22
- Inventor: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- Applicant: Yan Xun Xue , Hamza Yilmaz , Yueh-Se Ho , Jun Lu , Ping Huang , Lei Shi , Lei Duan , Yuping Gong
- Applicant Address: US CA Sunnyvale
- Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee: Alpha & Omega Semiconductor, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agency: CH Emily LLC
- Agent Chein-Hwa Tsao
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A WLCSP method comprises: depositing a metal bump on bonding pads of chips; forming a first packaging layer at front surface of wafer to cover metal bumps while forming an un-covered ring at the edge of wafer to expose the ends of each scribe line located between two adjacent chips; thinning first packaging layer to expose metal bumps; forming a groove on front surface of first packaging layer along each scribe line by cutting along a straight line extended by two ends of scribe line exposed on front surface of un-covered ring; grinding back surface of wafer to form a recessed space and a support ring at the edge of the wafer; depositing a metal layer at bottom surface of wafer in recessed space; cutting off the edge portion of wafer; and separating individual chips from wafer by cutting through first packaging layer, the wafer and metal layer along groove.
Public/Granted literature
- US20130210195A1 PACKAGING METHOD OF MOLDED WAFER LEVEL CHIP SCALE PACKAGE (WLCSP) Public/Granted day:2013-08-15
Information query
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