发明授权
US08565910B2 Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
有权
制造执行系统（MES），包括用于半导体制造过程的晶片采样引擎（WSE）
- 专利标题： Manufacturing execution system (MES) including a wafer sampling engine (WSE) for a semiconductor manufacturing process
- 专利标题（中）： 制造执行系统（MES），包括用于半导体制造过程的晶片采样引擎（WSE）
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申请号： US13020846申请日： 2011-02-04
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公开(公告)号： US08565910B2公开(公告)日： 2013-10-22
- 发明人: Gary W. Behm , Malek Ben Salem , Yue Li
- 申请人： Gary W. Behm , Malek Ben Salem , Yue Li
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理机构： Cantor Colburn LLP
- 代理商 Ian MacKinnon
- 主分类号： G05B13/02
- IPC分类号： G05B13/02
摘要：
A method of sampling semiconductor wafers includes passing a lot of semiconductor wafers into a semiconductor processing tool, processing a first portion of the lot in one process chamber of the semiconductor processing tool and a second portion of the lot in another process chamber of the semiconductor processing tool to produce processed semiconductor wafers, and initiating a wafer sampling engine to select at least one of the processed semiconductor wafers for sampling. The wafer sampling engine computes a long term process capability index for the processing tool and a short term process performance index for at least one of the processing tool and process chamber, identifies at least one desired sampling measurement type, selects the at least one of the processed semiconductor wafers for sampling, and collects the desired measurement types from the at least one of the processed semiconductor wafers selected for sampling.
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