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US08567051B2 Process for the vertical interconnection of 3D electronic modules by vias 有权
三维电子模块垂直互连的过程

Process for the vertical interconnection of 3D electronic modules by vias
Abstract:
A process for the vertical interconnection of 3D electronic modules (100), a module comprising a stack of K electronic wafer levels (19) electrically connected together by conductors lying along the direction of the stack that is perpendicular to the plane of a wafer.
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