发明授权
- 专利标题: Acceleration sensor having an electrode bridge
- 专利标题(中): 具有电极桥的加速度传感器
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申请号: US13057121申请日: 2009-08-04
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公开(公告)号: US08573059B2公开(公告)日: 2013-11-05
- 发明人: Arnd Kaelberer , Lars Tebje , Christian Bierhoff
- 申请人: Arnd Kaelberer , Lars Tebje , Christian Bierhoff
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102008042358 20080925
- 国际申请: PCT/EP2009/060097 WO 20090804
- 国际公布: WO2010/034555 WO 20100401
- 主分类号: G01P15/125
- IPC分类号: G01P15/125
摘要:
A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
公开/授权文献
- US20110197678A1 ACCELERATION SENSOR HAVING AN ELECTRODE BRIDGE 公开/授权日:2011-08-18
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