发明授权
US08573059B2 Acceleration sensor having an electrode bridge 有权
具有电极桥的加速度传感器

Acceleration sensor having an electrode bridge
摘要:
A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
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