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公开(公告)号：US20110197678A1
公开(公告)日：2011-08-18
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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公开(公告)号：US08573059B2
公开(公告)日：2013-11-05
申请号：US13057121
申请日：2009-08-04
申请人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
发明人： Arnd Kaelberer , Lars Tebje , Christian Bierhoff
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/0802
摘要： A capacitive micromechanical acceleration sensor has a substrate and a micromechanical functional layer situated above the substrate. A seismic mass, a suspension and fixed electrodes are situated in the micromechanical functional layer. The fixed electrodes are electrically connected to one another on a first and second side, respectively, of the suspension using buried conductor tracks. The fixed electrodes are connected to one another between the first and second side of the suspension using first and second conductors in the micromechanical functional layer.
摘要翻译： 电容微机械加速度传感器具有位于衬底上方的衬底和微机械功能层。 地震质量，悬架和固定电极位于微机械功能层。 固定电极分别在使用掩埋导体轨道的悬架的第一和第二侧上彼此电连接。 固定电极使用微机械功能层中的第一和第二导体在悬架的第一和第二侧之间彼此连接。
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公开(公告)号：US20100043549A1
公开(公告)日：2010-02-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/10
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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公开(公告)号：US08272268B2
公开(公告)日：2012-09-25
申请号：US12543649
申请日：2009-08-19
申请人： Johannes Classen , Arnd Kaelberer , Lars Tebje
发明人： Johannes Classen , Arnd Kaelberer , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P15/18 , G01P2015/0831
摘要： An acceleration sensor includes a substrate, a rocker mass, a z spring connected to the rocker mass, which allows the rocker mass to rotate about an axis, and at least one additional spring system connected to the substrate and the rocker mass. The additional spring system allows the rocker mass to deflect in an x or y direction oriented parallel or perpendicular to the axis. The z spring or the additional spring system allows the rocker mass to deflect in a y or x direction oriented parallel or perpendicular to the axis.
摘要翻译： 一个加速度传感器包括一个基板，一个摇臂质量体，一个连接在摇臂上的z弹簧，它允许摇臂质量绕一个轴线旋转，另外一个弹簧系统连接到基片和摇臂块上。 额外的弹簧系统允许摇杆质量在平行于或垂直于轴线定向的x或y方向上偏转。 z弹簧或附加弹簧系统允许摇杆质量在平行或垂直于轴线定向的y或x方向上偏转。
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5.发明授权公开(公告)号：US07878061B2
公开(公告)日：2011-02-01
申请号：US12323653
申请日：2008-11-26
IPC分类号： H01L21/76
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US20100107762A1
公开(公告)日：2010-05-06
申请号：US12610961
申请日：2009-11-02
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0831 , Y10T29/49124
摘要： An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
摘要翻译： 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。
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公开(公告)号：US08336382B2
公开(公告)日：2012-12-25
申请号：US12610961
申请日：2009-11-02
IPC分类号： G01P15/125
CPC分类号： G01P15/0802 , G01P15/125 , G01P2015/0831 , Y10T29/49124
摘要： An acceleration sensor is described that has a base substrate, a first electrode structure situated in stationary fashion relative to the base substrate, a sensor element having a first electrode area, and a spring device having at least one spring element. Via the spring element, the sensor element is coupled to the base substrate so that the sensor element is deflected relative to the base substrate as the result of an acceleration acting on the sensor element, thus changing the distance between the first electrode structure and the first electrode area. The sensor element and the first electrode structure are situated at least partially one over the other and are formed from a common functional layer.
摘要翻译： 描述了一种加速度传感器，其具有基底基板，相对于基底基板以固定方式设置的第一电极结构，具有第一电极区域的传感器元件和具有至少一个弹簧元件的弹簧装置。 通过弹簧元件，传感器元件联接到基底基板，使得由于作用在传感器元件上的加速度，传感器元件相对于基底基板偏转，从而改变第一电极结构与第一电极结构之间的距离 电极区域。 传感器元件和第一电极结构至少部分地位于另一个之上，并且由公共功能层形成。
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公开(公告)号：US20090152654A1
公开(公告)日：2009-06-18
申请号：US12323653
申请日：2008-11-26
CPC分类号： G01P15/125 , G01P15/0802
摘要： A micromechanical system includes a substrate, a first planar electrode, a second planar electrode, and a third planar electrode. The second planar electrode is movably positioned at a distance above the first planar electrode and the third planar electrode is positioned at a distance above the second electrode.
摘要翻译： 微机械系统包括基板，第一平面电极，第二平面电极和第三平面电极。 第二平面电极可移动地定位在第一平面电极之上的距离处，并且第三平面电极位于第二电极之上的距离处。
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公开(公告)号：US08915138B2
公开(公告)日：2014-12-23
申请号：US13450901
申请日：2012-04-19
IPC分类号： G01P15/125 , G01P15/08
CPC分类号： G01P15/125 , G01P2015/0831
摘要： An inertial sensor, comprising a substrate and a rocker that is connected to the substrate via a spring apparatus, the spring apparatus having at least two springs for suspending the rocker on the substrate, the two springs being disposed with an offset from one another with reference to their longitudinal axis.
摘要翻译： 一种惯性传感器，包括通过弹簧装置连接到基板的基板和摇杆，该弹簧装置具有至少两个用于将摇臂悬挂在基板上的弹簧，两个弹簧以参考的方式彼此偏移地设置 到它们的纵轴。
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公开(公告)号：US08393215B2
公开(公告)日：2013-03-12
申请号：US12468501
申请日：2009-05-19
申请人： Heiko Stahl , Dietrich Schubert , Lars Tebje
发明人： Heiko Stahl , Dietrich Schubert , Lars Tebje
IPC分类号： G01P15/125
CPC分类号： G01P15/125 , G01P2015/0814
摘要： A micromechanical acceleration sensor having a substrate, a suspension, a seismic mass, and stationary capacitive electrodes, in which the seismic mass is suspended over the substrate with the help of the suspension, the seismic mass has a mass center of gravity, the suspension has at least two anchors on the substrate, the two anchors are situated on opposite sides of the mass center of gravity, the distance between the two anchors being small compared to a horizontal extension of the seismic mass, the two anchors determine a central axis, the seismic mass have recesses which are situated on opposite sides of the central axis and are laterally open outward on the sides facing away from the central axis, and the stationary electrodes at least engage in the recesses of the seismic mass.
摘要翻译： 一种微机械加速度传感器，具有基板，悬架，抗震块和静止电容电极，其中借助于悬架将地震质量块悬挂在基板上，地震块具有质量重心，悬架具有 在基板上的至少两个锚固件，两个锚固件位于质量重心的相对侧上，两个锚固件之间的距离与地震块的水平延伸部分相比较小，两个锚固件确定中心轴线， 地震质量具有位于中心轴线的相对侧上的凹槽，并且在背离中心轴线的侧面上向外侧向开放，并且固定电极至少与地震块的凹部啮合。
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