发明授权
- 专利标题: Manufacturing-process equipment
- 专利标题(中): 制造加工设备
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申请号: US12971466申请日: 2010-12-17
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公开(公告)号: US08575791B2公开(公告)日: 2013-11-05
- 发明人: Wen-Yuh Jywe , Jing-Chung Shen , Chin-Tien Yang , Chien-Hung Liu , Jau-Jiu Ju , Chia-Hung Wu , Chun-Chieh Huang , Lili Duan , Yuan-Chin Lee
- 申请人: Wen-Yuh Jywe , Jing-Chung Shen , Chin-Tien Yang , Chien-Hung Liu , Jau-Jiu Ju , Chia-Hung Wu , Chun-Chieh Huang , Lili Duan , Yuan-Chin Lee
- 申请人地址: TW Huwei Chen, Yunlin Hsien
- 专利权人: National Formosa University
- 当前专利权人: National Formosa University
- 当前专利权人地址: TW Huwei Chen, Yunlin Hsien
- 代理机构: Nikolai & Mersereau, P.A.
- 代理商 C. G. Mersereau
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; H02K41/02
摘要:
A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.
公开/授权文献
- US20120156320A1 MANUFACTURING-PROCESS EQUIPMENT 公开/授权日:2012-06-21
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