Invention Grant
- Patent Title: Manufacturing-process equipment
- Patent Title (中): 制造加工设备
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Application No.: US12971466Application Date: 2010-12-17
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Publication No.: US08575791B2Publication Date: 2013-11-05
- Inventor: Wen-Yuh Jywe , Jing-Chung Shen , Chin-Tien Yang , Chien-Hung Liu , Jau-Jiu Ju , Chia-Hung Wu , Chun-Chieh Huang , Lili Duan , Yuan-Chin Lee
- Applicant: Wen-Yuh Jywe , Jing-Chung Shen , Chin-Tien Yang , Chien-Hung Liu , Jau-Jiu Ju , Chia-Hung Wu , Chun-Chieh Huang , Lili Duan , Yuan-Chin Lee
- Applicant Address: TW Huwei Chen, Yunlin Hsien
- Assignee: National Formosa University
- Current Assignee: National Formosa University
- Current Assignee Address: TW Huwei Chen, Yunlin Hsien
- Agency: Nikolai & Mersereau, P.A.
- Agent C. G. Mersereau
- Main IPC: G01B11/02
- IPC: G01B11/02 ; H02K41/02

Abstract:
A manufacturing-process equipment has a platform assembly, a measurement feedback assembly and a laser-working assembly. The platform assembly has a base and a hybrid-moving platform. The base has a mounting frame. The hybrid-moving platform is mounted on the base and has a long-stroke moving stage and a piezo-driven micro-stage. The long-stroke moving stage has a benchmark set and a driving device. The piezo-driven micro-stage is connected to the long-stroke moving stage and has a working platform. The measurement feedback assembly is securely mounted on the platform assembly and has a laser interferometer, a reflecting device and a signal-receiving device. The laser-working assembly is mounted on the platform assembly, is electrically connected to the measurement feedback assembly and has a laser direct-writing head, a controlling interface device and a positioning interface device.
Public/Granted literature
- US20120156320A1 MANUFACTURING-PROCESS EQUIPMENT Public/Granted day:2012-06-21
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