发明授权
- 专利标题: Process for fabricating a magnetic pole and shields
- 专利标题(中): 制造磁极和屏蔽的工艺
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申请号: US13154191申请日: 2011-06-06
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公开(公告)号: US08578594B2公开(公告)日: 2013-11-12
- 发明人: Ming Jiang , Ronghui Zhou , Guanghong Luo , Masahiro Osugi , Danning Yang
- 申请人: Ming Jiang , Ronghui Zhou , Guanghong Luo , Masahiro Osugi , Danning Yang
- 申请人地址: US CA Fremont
- 专利权人: Western Digital (Fremont), LLC
- 当前专利权人: Western Digital (Fremont), LLC
- 当前专利权人地址: US CA Fremont
- 主分类号: G11B5/127
- IPC分类号: G11B5/127 ; H04R31/00
摘要:
A process for fabricating a magnetic recording transducer for use in a data storage system comprises providing a substrate, an underlayer and a first nonmagnetic intermediate layer deposited to a first thickness on and in contact with the underlayer, performing a first scanning polishing on a first section of the first intermediate layer to planarize the first section of the first intermediate layer to a second thickness, providing a main pole in the planarized first section of the first intermediate layer, providing a first pattern of photoresist on and in contact with the first section of the first intermediate layer, the pattern comprising an aperture to define a side shield trench, performing a wet etch to remove at least a portion of the first intermediate layer thereby exposing at least one of the plurality of main pole sides, and depositing side shield material in the side shield trench.
公开/授权文献
- US20120304454A1 PROCESS FOR FABRICATING A MAGNETIC POLE AND SHIELDS 公开/授权日:2012-12-06
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