发明授权
- 专利标题： Thin-film battery methods for complexity reduction
- 专利标题（中）： 用于复杂度降低的薄膜电池方法
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申请号： US12882009申请日： 2010-09-14
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公开(公告)号： US08580332B2公开(公告)日： 2013-11-12
- 发明人: Byung-Sung Kwak , Nety M. Krishna
- 申请人： Byung-Sung Kwak , Nety M. Krishna
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Blakely Sokoloff Taylor & Zafman LLP
- 主分类号： B05D5/12
- IPC分类号： B05D5/12 ; B05C11/00 ; G03G13/16 ; C23C16/00
摘要：
Thin-film battery methods for complexity reduction are described. Processing equipment arrangements suitable to support thin-film battery methods for complexity reduction are also described. Cluster tools to support thin-film battery methods for complexity reduction are also described.
公开/授权文献
- US20110129594A1 THIN-FILM BATTERY METHODS FOR COMPLEXITY REDUCTION 公开/授权日：2011-06-02
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